MOLECULAR DYNAMICS SIMULATION OF ENERGETIC ATOM DEPOSITIONS OF Au/Au(100) FILM

doi:10.1088/1004-423X/8/4/008

Abstract

Abstract The energetic atom deposition of thin Au/Au(100) film has been studied by molecular dynamics simulation using the Au-Au interatomic interaction potential with embedded atom method. By investigating the variation of coverage curves and Bragg diffraction intensities during the film growth, the transition of Stranski-Kranstanov growth mode to Frank-van der Merwe growth mode was observed with the increase of the incident energy of deposition atoms. The role of energetic atoms in the film growth is discussed by analyzing the transport properties of deposited atoms and the evolution of incident energy and substrate temperatures.

Received: 24 April 1998
Revised: 27 October 1998
Accepted manuscript online:

PACS:	68.55.A-	(Nucleation and growth)
	81.15.Aa	(Theory and models of film growth)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 19835030).

Cite this article:

Zhang Qing-yu (张庆瑜), Pan Zheng-ying (潘正瑛), Tang Jia-yong (汤家镛) MOLECULAR DYNAMICS SIMULATION OF ENERGETIC ATOM DEPOSITIONS OF Au/Au(100) FILM 1999 Acta Physica Sinica (Overseas Edition) 8 296

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MOLECULAR DYNAMICS SIMULATION OF ENERGETIC ATOM DEPOSITIONS OF Au/Au(100) FILM

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