SIMULATION OF X-RAY DIFFRACTION OF MULTILAYER FILM WITH INTERFACIAL ROUGHNESS
GAO CHEN (高琛), LIU WEN-HAN (刘文汉), WU ZI-QIN (吴自勤)
Fundamental Physics Center, University of Science and Technology of China, Hefei 230026, China; Structure Research Labouratory, University of Science and Technology of China, Hefei 230026, China
Abstract In this paper, the X-ray diffraction profiles of multilayer with uncorrelated rough interfaces are directly simulated using kinematic theory of X-ray diffraction. The result shows that the decrease of the reflective intensity caused by the interracial roughness is more severe than that caused by random fluctuation of period of the same degree, and the decrease of the reflective intensity of high order Bragg deffraction is more rapid than that of low order ones. So it is very important to reduce the interracial roughness in the deposition and in the annealing of multilayer films.
Received: 27 April 1993
Accepted manuscript online:
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