NON-BOLTZMANN ENERGY LEVEL DISTRIBUTIONS OF ARGON ATOMS IN THE INDUCTIVELY COUPLED ARGON PLASMA
HUANG MAO (黄矛)a, LIU KE-LING (刘克玲)b
a Documentation and Information Centre, Academia Sinica, Beijing 100080, China; b Institute of Chemical Metallurgy, Academia Sinica, Beijing 100080, China
Abstract Based on collisional and radiative processes occurring in the inductively coupled plasma, non-Boltzmann energy level distributions of argon atoms are calculated under various conditions, by using ideal gas law and solving rate equations.
Received: 21 August 1991
Accepted manuscript online:
HUANG MAO (黄矛), LIU KE-LING (刘克玲) NON-BOLTZMANN ENERGY LEVEL DISTRIBUTIONS OF ARGON ATOMS IN THE INDUCTIVELY COUPLED ARGON PLASMA 1992 Acta Physica Sinica (Overseas Edition) 1 11
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