Micro thermoelectric devices: From principles to innovative applications
Qiulin Liu(刘求林)1,2, Guodong Li(李国栋)1,3,†, Hangtian Zhu(朱航天)1, and Huaizhou Zhao(赵怀周)1,2,3,‡
1 Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China; 2 School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China; 3 Songshan Lake Materials Laboratory, Dongguan 523808, China
Abstract Thermoelectric devices (TEDs), including thermoelectric generators (TEGs) and thermoelectric coolers (TECs) based on the Seebeck and Peltier effects, respectively, are capable of converting heat directly into electricity and vice versa. Tough suffering from low energy conversion efficiency and relatively high capital cost, TEDs have found niche applications, such as the remote power source for spacecraft, solid-state refrigerators, waste heat recycling, and so on. In particular, on-chip integrable micro thermoelectric devices (μ-TEDs), which can realize local thermal management, on-site temperature sensing, and energy harvesting under minor temperature gradient, could play an important role in biological sensing and cell cultivation, self-powered Internet of Things (IoT), and wearable electronics. In this review, starting from the basic principles of thermoelectric devices, we summarize the most critical parameters for μ-TEDs, design guidelines, and most recent advances in the fabrication process. In addition, some innovative applications of μ-TEDs, such as in combination with microfluidics and photonics, are demonstrated in detail.
Fund: The authors acknowledge the funding support of the National Key Research and Development Program of China (Grant No. 2018YFA0702100) and the National Natural Science Foundation of China (Grant No. 52172259). We thank Jiawei Yang and Nan Chen for valuable discussions.
Qiulin Liu(刘求林), Guodong Li(李国栋), Hangtian Zhu(朱航天), and Huaizhou Zhao(赵怀周) Micro thermoelectric devices: From principles to innovative applications 2022 Chin. Phys. B 31 047204
[1] Snyder G J and Toberer E S 2008 Nat. Mater. 7 105 [2] Yue Z, Zhao K, Chen H, Qiu P, Chen L and Shi X 2021 Chin. Phys. Lett. 38 117201 [3] Altenkirch E 1911 Phys. Z. 12 920 [4] Venkatasubramanian R, Siivola E, Colpitts T and O'Quinn B 2001 Nature413 597 [5] Wang H, Chen J, Lu T, Zhu K, Li S, Liu J and Zhao H 2018 Chin. Phys. B27 47212 [6] Lu T, Zhang X, Zhang J, Ning P, Li Y and Niu P 2019 AIP Advances9 095105 [7] Bryzek J 1996 Sensors and Actuators A:Physical56 1 [8] Bhushan B 2005 Nanotribology and Nanomechanics:An Introduction, Bhushan B ed. (Berlin, Heidelberg:Springer Berlin Heidelberg) pp. 1031-1089 [9] Judy J W 2001 Smart Materials and Structures10 1115 [10] Kim H S, Liu W and Ren Z 2017 Energy & Environmental Science 10 69 [11] Meng X, Fujisaka T, Ito K O and Suzuki R O 2014 Material Research Innovations18 S4 [12] Chowdhury I, Prasher R, Lofgreen K, Chrysler G, Narasimhan S, Mahajan R, Koester D, Alley R and Venkatasubramanian R 2009 Nat. Nanotech. 4 235 [13] Sauciuc I, Chrysler G, Mahajan R and Szleper M 2003 Nineteenth Annual IEEE Semiconductor Thermal Measurement and Management Symposium, 11 April 2003, pp. 74-81 [14] Tian F, Song B, Chen X, Ravichandran N K, Lv Y, Chen K, Sullivan S, Kim J, Zhou Y, Liu T H, Goni M, Ding Z, Sun J, Udalamatta Gamage G A G, Sun H, Ziyaee H, Huyan S, Deng L, Zhou J, Schmidt A J, Chen S, Chu C W, Huang P Y, Broido D, Shi L, Chen G and Ren Z 2018 Science361 582 [15] Gao L, Liu Q, Yang J, Wu Y, Liu Z, Qin S, Ye X, Jin S, Li G, Zhao H and Long Y 2020 Chin. Phys. Lett. 37 066202 [16] Blauth S, Leithäuser C and Pinnau R 2020 ZAMM-Journal of Applied Mathematics and Mechanics101 4 [17] Luo Z, Zeng L, Lau B, Lian Y and Heng C H 2018 IEEE Transactions on Circuits and Systems I:Regular Papers65 1744 [18] Yu Y, Guo Z, Zhu W, Zhou J, Guo S, Wang Y and Deng Y 2022 Nano Energy93 106818 [19] Manousiadis P P, Yoshida K, Turnbull G A and Samuel I D W 2020 Phil. Trans. Roy. Soc. A:Math. Phys. Eng. Sci. 378 20190186 [20] Kraemer D, Poudel B, Feng H P, Caylor J C, Yu B, Yan X, Ma Y, Wang X, Wang D, Muto A, McEnaney K, Chiesa M, Ren Z and Chen G 2011 Nat. Mater. 10 532 [21] Yin X, Yang R, Tan G and Fan S 2020 Science370 786 [22] Khan S, Kim J, Roh K, Park G and Kim W 2021 Nano Energy87 106180 [23] Leonov V and Vullers R J M 2009 Journal of Renewable and Sustainable Energy1 062701 [24] Kishi M, Nemoto H, Hamao T, Yamamoto M, Sudou S, Mandai M and Yamamoto S 1999 Eighteenth International Conference on Thermoelectrics. Proceedings, 29 Aug.-2 Sept. 1999, pp. 301-307 [25] Li G, Garcia Fernandez J, Lara Ramos D A, Barati V, Pérez N, Soldatov I, Reith H, Schierning G and Nielsch K 2018 Nat. Electron. 1 555 [26] Wu Z, Zhang S, Liu Z, Mu E and Hu Z 2022 Nano Energy91 106692 [27] Yan Q and Kanatzidis M G 2021 Nat. Mater. pp. 1-9 [28] Saini A, Kumar R and Kumar R 2021 Thermoelectricity and Advanced Thermoelectric Materials (Amsterdam:Elsevier) [29] Funahashi R, Chen L, Guilmeau E, Li Q, Min G and Miyazaki Y 2021 Thermoelectric Energy Conversion (Amsterdam:Elsevier) [30] Snyder G J and Snyder A H 2017 Energy & Environmental Science 10 2280 [31] Lee H 2010 Thermal Design:Heat Sinks, Thermoelectrics, Heat Pipes, Compact Heat Exchangers, and Solar Cells (Hoboken:John Wiley & Sons, Inc.) [32] Snyder G J 2009 Energy Harvesting Technologies (New York:Springer) Chapter 11, pp. 325-336 [33] Böttner H, Chen G and Venkatasubramanian R 2011 MRS Bulletin31 211 [34] Ohshita Y, Ogura A, Hoshino A, Suzuki T, Hiiro S and Machida H 2002 Journal of Crystal Growth235 365 [35] Dixit P and Miao J 2006 Journal of The Electrochemical Society153 G552 [36] Krauss E, Kullock R, Wu X, Geisler P, Lundt N, Kamp M and Hecht B 2018 Crystal Growth & Design 18 1297 [37] Wu T, Lee H K and Myung N V 2016 Journal of The Electrochemical Society163 D801 [38] Gao W, Muzyka K, Ma X, Lou B and Xu G 2018 Chem. Sci. 9 3911 [39] Nageswar S 1975 Electrodeposition and Surface Treatment (Elsevier BV) pp. 417-433 [40] Wen M, Blau S M, Spotte-Smith E W C, Dwaraknath S and Persson K A 2020 Chem. Sci. 12 1858 [41] Memming R 2015 Semiconductor Electrochemistry (Wiley-VCH Verlag GmbH & Co. KGaA) [42] Xiao F, Hangarter C, Yoo B, Rheem Y, Lee K H and Myung N V 2008 Electrochimica Acta53 8103 [43] Glatz W, Schwyter E, Durrer L and Hierold C 2009 Journal of Microelectromechanical Systems18 763 [44] Wu M, Binnemans K and Fransaer J 2014 Electrochimica Acta147 451 [45] Trung N H, Van Toan N and Ono T 2017 Journal of Micromechanics and Microengineering27 125006 [46] Jood P, Chetty R and Ohta M 2020 Journal of Materials Chemistry A8 13024 [47] Jin M, Liang J, Qiu P, Huang H, Yue Z, Zhou L, Li R, Chen L and Shi X 2021 J. Phys. Chem. Lett. 12 8246 [48] Zhang X, Li J, Wang X, Chen Z, Mao J, Chen Y and Pei Y 2018 J. Am. Chem. Soc. 140 15883 [49] Yang J, Li G, Zhu H, Chen N, Lu T, Gao J, Guo L, Xiang J, Sun P, Yao Y, Yang R and Zhao H 2022 Joule6 193 [50] Bu Z, Zhang X, Shan B, Tang J, Liu H, Chen Z, Lin S, Li W and Pei Y 2021 Sci. Adv. 7 eabf2738 [51] Schumacher C, Reinsberg K G, Rostek R, Akinsinde L, Baessler S, Zastrow S, Rampelberg G, Woias P, Detavernier C, Broekaert J A C, Bachmann J and Nielsch K 2013 Advanced Energy Materials3 95 [52] Schumacher C, Reinsberg K G, Akinsinde L, Zastrow S, Heiderich S, Toellner W, Rampelberg G, Detavernier C, Broekaert J A C, Nielsch K and Bachmann J 2012 Advanced Energy Materials2 345 [53] Becker E W, Ehrfeld W, Hagmann P, Maner A and Münchmeyer D 1986 Microelectronic Engineering4 35 [54] Snyder G J, Lim J R, Huang C K and Fleurial J P 2003 Nat. Mater. 2 528 [55] Zhang W, Yang J and Xu D 2016 Journal of Microelectromechanical Systems25 744 [56] Ngo T D, Kashani A, Imbalzano G, Nguyen K T Q and Hui D 2018 Composites Part B Engineering143B 172 [57] Guo N and Leu M C 2013 Frontiers of Mechanical Engineering8 215 [58] He M, Zhao Y, Wang B, Xi Q, Zhou J and Liang Z 2015 Small11 5889 [59] Zhang S, Liu Y Q, Hao J N, Wallace G G, Beirne S and Chen J 2022 Advanced Functional Materials32 2103092 [60] Qiu J, Yan Y, Luo T, Tang K, Yao L, Zhang J, Zhang M, Su X, Tan G, Xie H, Kanatzidis M G, Uher C and Tang X 2019 Energy & Environmental Science 12 3106 [61] Kim F, Kwon B, Eom Y, Lee J E, Park S, Jo S, Park S H, Kim B S, Im H J, Lee M H, Min T S, Kim K T, Chae H G, King W P and Son J S 2018 Nat. Energy3 301 [62] Dun C, Kuang W, Kempf N, Saeidi-Javash M, Singh D J and Zhang Y 2019 Adv. Sci. 6 1901788 [63] Burton M R, Mehraban S, Beynon D, McGettrick J, Watson T, Lavery N P and Carnie M J 2019 Advanced Energy Materials9 1900201 [64] Kim F, Yang S E, Ju H, Choo S, Lee J, Kim G, Jung S H, Kim S, Cha C, Kim K T, Ahn S, Chae H G and Son J S 2021 Nat. Electron. 4 579 [65] Tanusilp S A and Kurosaki K 2019 Materials12 1943 [66] Steele M C and Rosi F D 1958 J. Appl. Phys. 29 1517 [67] Dismukes J P, Ekstrom L, Steigmeier E F, Kudman I and Beers D S 1964 J. Appl. Phys. 35 2899 [68] Zhu G P, Zhao C W, Wang X W and Wang J 2021 Chin. Phys. Lett. 38 024401 [69] Strasser M, Aigner R, Lauterbach C, Sturm T F, Franosch M and Wachutka G 2004 Sensors and Actuators A:Physical114 362 [70] Yu X, Wang Y, Liu Y, Li T, Zhou H, Gao X, Feng F, Roinila T and Wang Y 2012 Journal of Micromechanics and Microengineering22 105011 [71] Hu G, Edwards H and Lee M 2019 Nat. Electron. 2 300 [72] Liang J S, Wang T, Qiu P F, Yang S Q, Ming C, Chen H Y, Song Q F, Zhao K P, Wei T R, Ren D D, Sun Y Y, Shi X, He J and Chen L D 2019 Energy & Environmental Science 12 2983 [73] Qu W, Plötner M and Fischer W J 2001 Journal of Micromechanics and Microengineering11 146 [74] Goncalves L M, Couto C, Alpuim P and Correia J H 2008 Journal of Micromechanics and Microengineering18 064008 [75] Kurosaki J, Yamamoto A, Tanaka S, Cannon J, Miyazaki K and Tsukamoto H 2009 Journal of Electronic Materials38 1326 [76] Wang W, Jia F, Huang Q and Zhang J 2005 Microelectronic Engineering77 223 [77] Bottner H, Nurnus J, Gavrikov A, Kuhner G, Jagle M, Kunzel C, Eberhard D, Plescher G, Schubert A and Schlereth K H 2004 Journal of Microelectromechanical Systems13 414 [78] Bottner H 2005 24th International Conference on Thermoelectrics, 19-23 June 2005, pp. 1-8 [79] Bottner H, Nurnus J, Schubert A and Volkert F 2007 26th International Conference on Thermoelectrics, 3-7 June 2007, pp. 1-4 [80] Li J F, Tanaka S, Umeki T, Sugimoto S, Esashi M and Watanabe R 2003 Sensors and Actuators A:Physical108 97 [81] Yu Y, ZhuW,Wang Y, Zhu P, Peng K and Deng Y 2020 Applied Energy275 115404 [82] Qin D, Pan F, Zhou J, Xu Z and Deng Y 2021 Nano Energy89 106472 [83] Tarancón A 2019 Nat. Electron. 2 270 [84] Mishu M K, Rokonuzzaman M, Pasupuleti J, Shakeri M, Rahman K S, Hamid F A, Tiong S K and Amin N 2020 Electronics9 1345 [85] Wang Z L and Wu W 2012 Angew. Chem. Int. Ed. Engl. 51 11700 [86] Champier D 2017 Energy Conversion & Management 140 167 [87] Haras M and Skotnicki T 2018 Nano Energy54 461 [88] Webb P 1992 Eur. J. Appl. Physiol. Occup. Physiol. 64 471 [89] Holmes A S, Hong G, Pullen K R and Buffard K R 2004 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, 25-29 Jan. 2004, pp. 568-571 [90] Duangsuwan S, Leukachorn T, Chinsawatpan S and Promwong S 2009 IEEE 9th Malaysia International Conference on Communications, 15-17 Dec. 2009, pp. 686-690 [91] Lee H J, Sherrit S, Tosi L P, Walkemeyer P and Colonius T 2015 Sensors15 26039 [92] Howey D A, Bansal A and Holmes A S 2011 Smart Materials and Structures20 085021 [93] Sherrit S, Lee H J, Walkemeyer P, Winn T, Tosi L P and Colonius T 2015 SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 3 April 2015, pp. 943507-943519 [94] Suarez F, Nozariasbmarz A, Vashaee D and Öztürk M C 2016 Energy & Environmental Science 9 2099 [95] Monteith J L 1974 Heat Loss from Animals and Man (Amsterdam:Elsevier) [96] Torfs T, Leonov V, Hoof C V and Gyselinckx B 2006 IEEE Conference on Sensors, 22-25 Oct. 2006, pp. 427-430 [97] Leonov V, Torfs T, Fiorini P and Hoof C V 2007 IEEE Sensors Journal7 650 [98] Torfs T, Leonov V and Vullers R 2007 Sensors & Transducers J. 80 1230 [99] Yang Y, Hu H, Chen Z, Wang Z, Jiang L, Lu G, Li X, Chen R, Jin J, Kang H, Chen H, Lin S, Xiao S, Zhao H, Xiong R, Shi J, Zhou Q, Xu S and Chen Y 2020 Nano Lett. 20 4445 [100] Zhou Q, Zhu K, Li J, Li Q, Deng B, Zhang P, Wang Q, Guo C, Wang W and Liu W 2021 Adv. Sci. 8 2004947 [101] Lawrence M G 2005 Bulletin of the American Meteorological Society86 225 [102] Liang D and Bowers J E 2010 Nat. Photonics4 511 [103] Biberman A, Manipatruni S, Ophir N, Chen L, Lipson M and Bergman K 2010 Opt. Express18 15544 [104] Assefa S, Green W M J, Rylyakov A, Schow C, Horst F and Vlasov Y A 2011 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference, 6-10 March 2011, pp. 1-3 [105] Cunningham J E, Krishnamoorthy A V, Ho R, Shubin I, Thacker H, Lexau J, Lee D C, Feng D, Chow E, Luo Y, Zheng X, Li G, Yao J, Pinguet T, Raj K, Asghari M and Mitchell J G 2011 IEEE Journal of Selected Topics in Quantum Electronics17 546 [106] Swillam M A, Zaki A O, Kirah K and Shahada L A 2019 Sci. Rep. 9 6669 [107] Nejadriahi H, Friedman A, Sharma R, Pappert S, Fainman Y and Yu P 2020 Opt. Express28 24951 [108] Ribeiro A and Bogaerts W 2017 Opt. Express25 29778 [109] Zhang C, Liang D, Kurczveil G, Bowers J E and Beausoleil R G 2015 IEEE Journal of Selected Topics in Quantum Electronics21 385 [110] Sysak M N, Di L, Jones R, Kurczveil G, Piels M, Fiorentino M, Beausoleil R G and Bowers J E 2011 IEEE Journal of Selected Topics in Quantum Electronics17 1490 [111] Enright R, Lei S, Cunningham G, Mathews I, Frizzell R and Shen A 2017 ECS Journal of Solid State Science and Technology6 N3103 [112] Garcia J, Ramos D A L, Mohn M, Schlörb H, Rodriguez N P, Akinsinde L, Nielsch K, Schierning G and Reith H 2017 ECS Journal of Solid State Science and Technology6 N3022 [113] Nemoto K, Kita T and Yamada H 2012 The 9th International Conference on Group IV Photonics (GFP), 29-31 Aug. 2012, pp. 216-218 [114] Komma J, Schwarz C, Hofmann G, Heinert D and Nawrodt R 2012 Appl. Phys. Lett. 101 041905 [115] Enright R, Shenghui L, Nolan K, Mathews I, Shen A, Levaufre G, Frizzell R, Guang-Hua D and Hernon D 2014 Bell Labs Technical Journal19 31 [116] Balagadde F K, You L, Hansen C L, Arnold F H and Quake S R 2005 Science309 137 [117] Whitesides G M 2006 Nature442 368 [118] El-Ali J, Sorger P K and Jensen K F 2006 Nature442 403 [119] Shi H, Nie K, Dong B, Long M, Xu H and Liu Z 2019 Chem. Eng. J. 361 635 [120] Javanmard M 2019 J. Allergy Clin. Immunol. 143 542 [121] Trieu N, Sune Z G A, Anders W and Dang D B 2018 Micromachines9 403 [122] Kuhnemund M, Witters D, Nilsson M and Lammertyn J 2014 Lab Chip14 2983 [123] Huh D, Matthews B D, Mammoto A, Montoya-Zavala M, Hsin H Y and Ingber D E 2010 Science328 1662 [124] Hong B, Xue P, Wu Y, Bao J, Chuah Y J and Kang Y 2016 Biomed. Microdevices18 21 [125] Sébastien C and Siari A 2019 Status of the Microfluidics Industry Market and Technology, Report [126] Lei Z, Xie D, Mbogba M K, Chen Z, Tian C, Xu L and Zhao G 2019 Lab Chip19 1929 [127] Begasse M L, Leaver M, Vazquez F, Grill S W and Hyman A A 2015 Cell Rep. 10 647 [128] Warocquier R and Scherrer K 1969 Eur. J. Biochem. 10 362 [129] Fang C, Ji F, Shu Z and Gao D 2017 Lab Chip17 951 [130] Peng J, Fang C, Ren S, Pan J, Jia Y, Shu Z and Gao D 2019 International Journal of Heat and Mass Transfer130 660 [131] Rosengarten G, Mutzenich S and Kalantar-zadeh K 2006 Experimental Thermal and Fluid Science30 821 [132] Kopparthy V L, Tangutooru S M, Nestorova G G and Guilbeau E J 2012 Sensors and Actuators B:Chemical166-167 608 [133] Nestorova G G, Adapa B S, Kopparthy V L and Guilbeau E J 2016 Sensors and Actuators B:Chemical225 174 [134] Nestorova G G, Kopparthy V L, Crews N D and Guilbeau E J 2015 Analytical Methods7 2055
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
