Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

doi:10.1088/1674-1056/23/4/044302

Abstract A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro-perforated panel (MPP) resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems (MEMS) technology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezoelectric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41 mV.

Keywords: hybrid device noise energy harvesting acoustic noise reduction silicon micro-perforated panel

Received: 11 June 2013
Revised: 05 September 2013
Accepted manuscript online:

PACS:	43.50.-x	(Noise: its effects and control)
	88.05.De	(Thermodynamic constraints on energy production)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 51305423) and the National Basic Research Program of China (Grant No. 2011CB302104).

Corresponding Authors: Zhao Zhan
E-mail: cpl_sci@163.com

About author: 43.50.-x; 88.05.De

Cite this article:

Wu Shao-Hua (吴少华), Du Li-Dong (杜利东), Kong De-Yi (孔德义), Ping Hao-Yue (平皓月), Fang Zhen (方震), Zhao Zhan (赵湛) Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure 2014 Chin. Phys. B 23 044302

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Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

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