TiOx-based self-rectifying memory device for crossbar WORM memory array applications

doi:10.1088/1674-1056/abc548

Abstract Resistive switching with a self-rectifying feature is one of the most effective solutions to overcome the crosstalk issue in a crossbar array. In this paper, a memory device based on Pt/TiO_x/W structure with self-rectifying property is demonstrated for write-once-read-many-times (WORM) memory application. After programming, the devices exhibit excellent uniformity and keep in the low resistance state (LRS) permanently with a rectification ratio as high as 10⁴ at 1 V. The self-rectifying resistive switching behavior can be attributed to the Ohmic contact at TiO_x/W interface and the Schottky contact at Pt/TiO_x interface. The results in this paper demonstrate the potential application of TiO_x-based WORM memory device in crossbar arrays.

Keywords: resistive switching memory write-once-read-many-times (WORM) self-rectifying crossbar array

Received: 02 October 2020
Revised: 26 October 2020
Accepted manuscript online: 28 October 2020

PACS:	61.72.jd	(Vacancies)
	68.60.-p	(Physical properties of thin films, nonelectronic)
	72.20.-i	(Conductivity phenomena in semiconductors and insulators)
	73.40.Rw	(Metal-insulator-metal structures)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 61774079 and 61664001), the Science and Technology Plan of Gansu Province, China (Grant No. 20JR5RA307), and the Key Research and Development Program of Gansu Province, China (Grant No. 18YF1GA088).

Corresponding Authors: ^†Corresponding author. E-mail: xp.gao@gsas.ac.cn ^‡Corresponding author. E-mail: li_yt06@lzu.edu.cn

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Li-Ping Fu(傅丽萍), Xiao-Qiang Song(宋小强), Xiao-Ping Gao(高晓平), Ze-Wei Wu(吴泽伟), Si-Kai Chen(陈思凯), and Ying-Tao Li(李颖弢) TiO_x-based self-rectifying memory device for crossbar WORM memory array applications 2021 Chin. Phys. B 30 016103

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TiOx-based self-rectifying memory device for crossbar WORM memory array applications

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TiO_x-based self-rectifying memory device for crossbar WORM memory array applications