CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
Prev
Next
|
|
|
Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming |
Zhao Ke (赵克), Feng Li-Hui (冯立辉), Wang Qian-Qian (王茜蒨), Liu Ming-Zhi (刘明智), Wang Ben-Guo (王本国), Cui Fang (崔芳), Sun Yu-Nan (孙雨南) |
School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China |
|
|
Abstract In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppress this error at quartz level. The trimming law is obtained through the finite element method (FEM). A femtosecond laser processing system is used to trim the gold balancing masses on the beams, and experimental results are basically consistent with the simulated ones. The mechanical quadrature error is suppressed by 96%, from 26.3° s-1 to 1.1° s-1. Nonlinearity changes from 1.48% to 0.30%, angular random walk (ARW) is reduced from 2.19° h-1/2 to 1.42° h-1/2, and bias instability is improved by a factor of 7.7, from 197.6° h-1 to 25.4° h-1.
|
Received: 03 June 2013
Revised: 02 July 2013
Accepted manuscript online:
|
PACS:
|
79.20.Eb
|
(Laser ablation)
|
|
06.30.Gv
|
(Velocity, acceleration, and rotation)
|
|
02.70.Dh
|
(Finite-element and Galerkin methods)
|
|
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 61027007). |
Corresponding Authors:
Feng Li-Hui
E-mail: lihui.feng@bit.edu.cn
|
Cite this article:
Zhao Ke (赵克), Feng Li-Hui (冯立辉), Wang Qian-Qian (王茜蒨), Liu Ming-Zhi (刘明智), Wang Ben-Guo (王本国), Cui Fang (崔芳), Sun Yu-Nan (孙雨南) Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming 2013 Chin. Phys. B 22 117901
|
[1] |
Nonomura Y, Fujiyoshi M, Omura Y, Fujitsuka N, Mizuno K and Tsukada K 2006 Sensor. Actuat. A 132 42
|
[2] |
Hu Z X, Gallacher B J, Burdess J S, Fell C P and Townsend K 2011 Sensor. Actuat. A 167 249
|
[3] |
Madni A M, Costlow L E and Knowles S J 2003 IEEE Sens. J. 3 569
|
[4] |
Xie L Q, Wu X Z and Li S Y 2010 Sensors 10 1573
|
[5] |
Parent A, Traon O L, Masson S and Foulgoc B L 2007 IEEE Sensors Conference, October 28–31, 2007 Atlanta, Georgia, USA, p. 876
|
[6] |
Wu X Z, Xie L Q, Xing J C, Dong P T, Wang H X and Su J B 2012 IEEE Sen. J. 12 1246
|
[7] |
Tatar E, Alper S E and Akin T 2012 J. Microelectromech. Syst. 21 656
|
[8] |
Alper S E, Temiz Y and Akin T 2008 J. Microelectromech. Syst. 17 1418
|
[9] |
Geiger W, Butt W U, Gaisser A, Frech J, Braxmaier M, Link T, Kohne A, Nommensen P, Sandmaier H and Lang W 2002 Sensor. Actuat. A 95 239
|
[10] |
Descharles M, Guerard J, Kokabi H and Le Traon O 2012 Sensor. Actuat. A 181 25
|
[11] |
Saukoski M, Aaltonen L and Halonen K A I 2007 IEEE Sens. J. 7 1639
|
[12] |
Painter C C and Shkel A M 2003 IEEE Sens. J. 3 595
|
[13] |
Günthner S, Egretzberger M, Kugi A and Kapser K 2006 IEEE Sens. J. 6 596
|
[14] |
Knowles S J and Moore R H 2010 European Patent 1174681B1 [2010-6-2]
|
[15] |
Tchertkov I L, Aston S E H, August R J and Jaffe R 2009 U.S. Patent 7548318B2 [2009-6-16]
|
[16] |
Knowles S J and Moore R H 2009 U.S. Patent 7523537B1 [2009-4-28]
|
[17] |
Kawauchi O, Miyazawa S, Takayama K and Yamaguchi K 2007 U.S. Patent 7207221B2 [2007-4-24]
|
[18] |
Li C, Argument M and Tsui Y Y 2000 Applications of Photonic Technology, December 15, 2000 Quebec City, Canada, p. 1194
|
[19] |
Momma C, Chichkov B N and Nolte S 1996 Opt. Commun. 129 134
|
[20] |
Painter C C and Shkel A M 2002 Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, March 18–20, 2002 San Diego, CA, USA, p. 157
|
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|