Measurement accuracy analysis of the free carrier absorption determination of the electronic transport properties of silicon wafers

doi:10.1088/1674-1056/20/6/068105

Abstract By introducing the random and systematic errors in simulated data computed from conventional frequency-scan and laterally resolved modulated free carrier absorption theory models, we investigate the relative determination sensitivities of three electronic transport properties, namely, carrier lifetime, carrier diffusivity and front surface recombination velocity of silicon wafers determined by frequency-scan and laterally resolved techniques. The phase and amplitude data with random errors as functions of the modulation frequency at zero pump-probe-beam separation or of the two-beam separation at four different modulation frequencies are simultaneously fitted to an appreciated carrier diffusion model to extract three transport parameters. The statistical results and fitted accuracies of the transport parameter determined by both techniques are theoretically analysed. Corresponding experimental results are carried out to compare to the simulated results. The simulated and experimental results show that the determination of the transport properties of silicon wafers by the laterally resolved technique are more accurate, as compared with that by the frequency-scan technique.

Keywords: laterally resolved modulated free-carrier absorption frequency scans electronic transport properties accuracy

Received: 14 September 2010
Revised: 14 January 2011
Accepted manuscript online:

PACS:	81.70.Fy	(Nondestructive testing: optical methods)
	72.02.Jv
	72.10.-d	(Theory of electronic transport; scattering mechanisms)

Fund: Project supported by the Fundamental Research Funds for the Central Universities of China (Grant No. ZYGX2009J051).

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Zhang Xi-Ren(张希仁), Gao Chun-Ming(高椿明), Zhou Ying(周鹰), and Wang Zhan-Ping(王占平) Measurement accuracy analysis of the free carrier absorption determination of the electronic transport properties of silicon wafers 2011 Chin. Phys. B 20 068105

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Measurement accuracy analysis of the free carrier absorption determination of the electronic transport properties of silicon wafers

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