Study of effect of H2 addition on the production of fluorocarbon radicals in H2C4F8 inductively coupled plasma via optical emission spectroscopy actinometry
Huang Song (黄松), Xin Yu (辛煜), Ning Zhao-Yuan (宁兆元)
Department of Physics, Suzhou University, Suzhou 215006,China
Abstract C4F8 plasma with the addition of H2 is generated by the inductively coupled plasma (ICP) method. The relative densities of CF,CF2, H and F radicals are determined by actinometric optical emission spectroscopy (AOES) as a function of the gas flow rate ratio R=H2/(H2+C4F8 at a pressure of 0.8 Pa and an input r.f.power of 400W, while that of HF is measured by quadrupole mass spectrometry (QMS). The results show that plasma activity increases firstly and then decreases with increasing R. As the gas flow rate ratio R changes from 0 to 0.625, relative densities of both CF and CF2 decrease, and the relative [CF] has a similar tendency as the calculated [CF], indicating that CF radicals are generated mainly by the electron impact dissociation of CF2 radicals. Production of HF is also discussed.
Received: 16 September 2004
Revised: 23 November 2004
Accepted manuscript online:
PACS:
52.25.Os
(Emission, absorption, and scattering of electromagnetic radiation ?)
Fund: Project supported by the Foundation of Key Laboratory of Thin Films, Jiangsu province, China, and the NationalNatural Science Foundation of China (Grant No 10305008).
Cite this article:
Huang Song (黄松), Xin Yu (辛煜), Ning Zhao-Yuan (宁兆元) Study of effect of H2 addition on the production of fluorocarbon radicals in H2C4F8 inductively coupled plasma via optical emission spectroscopy actinometry 2005 Chinese Physics 14 1608
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