Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

doi:10.1088/1674-1056/22/6/060309

Abstract Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks, Al/AlO_x/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (j_c) and wide range of junction sizes from 0.01 μm² up to 1 μm². We have carried out systematical studies on the oxidation process in fabricating Al/AlO_x/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubit and charge-flux qubit.

Keywords: Josephson junction Al/AlO_x/Al superconducting qubit

Received: 31 January 2013
Revised: 27 February 2013
Accepted manuscript online:

PACS:	03.67.Lx	(Quantum computation architectures and implementations)
	85.25.Cp	(Josephson devices)
	85.25.Dq	(Superconducting quantum interference devices (SQUIDs))

Fund: Project supported by the Science Foundation of the Ministry of Science and Technology of China (Grant Nos. 2011CBA00106 and 2009CB929102), the National Natural Science Foundation of China (Grant Nos. 11104333, 10974243, and 11161130519), and the Knowledge Innovation Program of the Chinese Academy of Sciences.

Corresponding Authors: Zheng Dong-Ning
E-mail: dzheng@aphy.iphy.ac.cn

Cite this article:

Wu Yu-Lin (吴玉林), Deng Hui (邓辉), Yu Hai-Feng (于海峰), Xue Guang-Ming (薛光明), Tian Ye (田野), Li Jie (李洁), Chen Ying-Fei (陈莺飞), Zhao Shi-Ping (赵士平), Zheng Dong-Ning (郑东宁) Fabrication of Al/AlO_x/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process 2013 Chin. Phys. B 22 060309

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Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

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Fabrication of Al/AlO_x/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process