Chin. Phys. B
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Chin. Phys. B  2013, Vol. 22 Issue (6): 060309    DOI: 10.1088/1674-1056/22/6/060309
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Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process
Wu Yu-Lin, Deng Hui, Yu Hai-Feng, Xue Guang-Ming, Tian Ye, Li Jie, Chen Ying-Fei, Zhao Shi-Ping, Zheng Dong-Ning
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics,Chinese Academy of Sciences, Beijing 100190, China

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