Abstract This paper investigates the procedure of cubic boron nitride (cBN) thin film delamination by Fourier-transform infrared (IR) spectroscopy. It finds that the apparent IR absorption peak area near 1380 cm$^{-1}$ and 1073 cm$^{-1}$ attributed to the B--N stretching vibration of sp$^{2}$-bonded BN and the transverse optical phonon of cBN, respectively, increased up to 195% and 175% of the original peak area after film delamination induced compressive stress relaxation. The increase of IR absorption of sp$^{2}$-bonded BN is found to be non-linear and hysteretic to film delamination, which suggests that the relaxation of the turbostratic BN (tBN) layer from the compressed condition is also hysteretic to film delamination. Moreover, cross-sectional transmission electron microscopic observations revealed that cBN film delamination is possible from near the aBN(amorphous BN)/tBN interface at least for films prepared by plasma-enhanced chemical vapour deposition.
Received: 04 October 2007
Revised: 13 March 2008
Accepted manuscript online:
Fund: Project supported by the National
Science Foundation of Zhejiang Province, China (Grant No Y405051),
the Zhejiang Provincial Education Department, China (Grant No
20061365), and the Education Ministry Scientific Research Startup
Foundation for Returnee, C
Cite this article:
Yang Hang-Sheng(杨杭生), Zhang Jian-Ying(张健英), Nie An-Min(聂安民), and Zhang Xiao-Bin(张孝彬) In situ infrared spectroscopic study of cubicboron nitride thin film delamination 2008 Chin. Phys. B 17 3453
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