Compact NbN resonators with high kinetic inductance

doi:10.1088/1674-1056/abc2b8

Abstract We design and fabricate Λ/2 coplanar waveguide NbN resonators, the thickness and length of which are only several nanometers and hundred microns, respectively. The quality factor of such compact resonators can reach up to 7.5×10⁴ at single photon power level at 30 mK with the resonance frequency around 6.835 GHz. In order to tune the resonant frequency, the resonator is terminated to the ground with a dc-SQUID. By tuning the magnetic flux in the dc-SQUID, the effective inductance of the dc-SQUID is varied, which leads to the change in the resonant frequency of the resonator. The tunability range is more than 30 MHz and the quality factor is about 3×10³. These compact and tunable NbN resonators have potential applications in the quantum information processing, such as in the precision measurement, coupling and/or reading out the quantum states of qubits.

Keywords: superconducting resonator NbN kinetic inductance tunable resonator

Received: 24 August 2020
Revised: 02 October 2020
Accepted manuscript online: 20 October 2020

PACS:	84.40.Dc	(Microwave circuits)
	85.25.Dq	(Superconducting quantum interference devices (SQUIDs))

Fund: Project partially supported by the National Key R&D Program of China (Grant No. 2016YFA0301801), the National Natural Science Foundation of China (Grant Nos. 11474154 and 61521001), PAPD, Dengfeng Project B of Nanjing University, and the Fundamental Research Funds for the Central Universities, China (Grant No. 14380134).

Corresponding Authors: ^†Corresponding author. E-mail: gzsun@nju.edu.cn

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Xing-Yu Wei(魏兴雨), Jia-Zheng Pan(潘佳政), Ya-Peng Lu(卢亚鹏), Jun-Liang Jiang(江俊良), Zi-Shuo Li(李子硕), Sheng Lu(卢盛), Xue-Cou Tu(涂学凑), Qing-Yuan Zhao(赵清源), Xiao-Qing Jia(贾小氢), Lin Kang(康琳), Jian Chen(陈健), Chun-Hai Cao(曹春海), Hua-Bing Wang(王华兵), Wei-Wei Xu(许伟伟), Guo-Zhu Sun(孙国柱), and Pei-Heng Wu(吴培亨) Compact NbN resonators with high kinetic inductance 2020 Chin. Phys. B 29 128401

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