Thermal and mechanical characterizations of a substrate-free focal plane array

doi:10.1088/1674-1056/19/1/010701

Abstract We propose a substrate-free focal plane array (FPA) in this paper. The solid substrate is completely removed, and the microcantilevers extend from a supporting frame. Using finite element analysis, the thermal and mechanical characterizations of the substrate-free FPA are presented. Because of the large decrease in thermal conductance, the supporting frame is temperature dependent, which brings out a unique feature: the lower the thermal conductance of the supporting frame is, the higher the energy conversion efficiency in the substrate-free FPA will be. The results from the finite element analyses are consistent with our measurements: two types of substrate-free FPAs with pixel sizes of 200× 200 and 60 × 60 μm² are implemented in the proposed infrared detector. The noise equivalent temperature difference (NETD) values are experimentally measured to be 520 and 300~mK respectively. Further refinements are considered in various aspects, and the substrate-free FPA with a pixel size of 30 × 30 μm² has a potential of achieving an NETD value of 10 mK.

Keywords: focal plane array infrared detectors substrate-free uncooled

Received: 20 March 2009
Revised: 18 May 2009
Accepted manuscript online:

PACS:	07.57.Kp	(Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors)
	02.70.Dh	(Finite-element and Galerkin methods)
	07.10.Cm	(Micromechanical devices and systems)
	85.60.Gz	(Photodetectors (including infrared and CCD detectors))

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 10732080 and 10627201), and the National Basic Research Program of China (Grant No. 2006CB300404).

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Cheng Teng(程腾), Zhang Qing-Chuan(张青川), Chen Da-Peng(陈大鹏), Shi Hai-Tao(史海涛), Gao Jie(高杰), Qian Jian(钱剑), and Wu Xiao-Ping(伍小平) Thermal and mechanical characterizations of a substrate-free focal plane array 2010 Chin. Phys. B 19 010701

[1]	Lloyd J M 1975 Thermal Imaging Systems (New York: Plenum Press)
[2]	Miller J L 1994 Principles of Infrared Technology (New York: Cluwer Academic Pub)
[3]	Rogalski A 2003 Infrared Detectors: Status and TrendsIn: Prog. Quant. Electron. 27 p59
[4]	Li B 2004 Sensor Actuat. A 112 351
[5]	Boisen A, Thaysen J, Jensenius H and Hansen O 2000 Ultramicroscopy 82 11
[6]	Gotszalk T, Grabiec P and Rangelow I W 2000 Ultramicroscopy 82 39
[7]	Manalis S R, Minne S C, Quate C F, Yaralioglu G G and Atalar A 1997 Appl. Phys. Lett. 70 3311
[8]	Perazzo T, Mao M, Kwon O and Majumdar A 1999 Appl. Phys. Lett. 74 3567
[9]	Zhao Y, Mao M, Horowitz R, Majumdar A, Varesi J, Norton P and Kitching J 2002 J. Microelectromech. S 11 136
[10]	Grbovic D, Lavrik N V, Datskos P G, Forrai D, Nelson E, Devitt J and McIntyre B 2006 Appl. Phys. Lett. 89 073118
[11]	Pan L, Zhang Q C, Wu X P, Duan Z H, Chen D P, Wang W B and Guo Z Y 2004 J. Experimental Mechanics 19 403 (in Chinese)
[12]	Li C B, Jiao B B, Shi S L, Chen D P, Ye T C, Zhang Q C, Guo Z Y, Dong F L and Miao Z Y 2006 Meas. Sci. Technol. 17 1981
[13]	Miao Z Y, Zhang Q C, Chen D P, Guo Z Y, Dong F L, Xiong Z M, Wu X P, Li C B and Jiao B B 2007 Ultramicroscopy 107 640
[14]	Dong F L, Zhang Q C, Chen D P, Miao Z Y, Xiong Z M, Guo Z Y, Li C B, Jiao B B and Wu X P 2008 Ultramicroscopy 108 579
[15]	Kruse P W 1997 Principles of Uncooled Infrared Focal Plane Arrays In: Semiconduct. Semimet. 47 p17
[16]	Zhao Y 2002 Optomechnical Uncooled Infrared Imaging System Ph. D Thesis, University of California, Berkeley, USA
[17]	Xiong Z M, Zhang Q C, Gao J, Wu X P, Chen D P and Jiao B B 2007 J. Appl. Phys. 02 113524
[18]	Wood R A 1997 Monolithic Silicon Microbolometer Arrays In: Semiconduct. Semimet. 47 p43
[19]	Goodman J W 2006 Introduction to Fourier Optics 2nd Ed. (New York: McGRAW-HILL) p139
[20]	Duan Z H, Zhang Q C, Wu X P, Pan L, Chen D P, Wu X P and Guo Z Y 2003 Chin. Phys. Lett. 20 2130
[21]	Miao Z Y, Zhang Q C, Guo Z Y, Wu X P and Chen D P 2007 Opt. Lett. 32 594
[22]	Grbovic D, Lavrik N V, Rajic S and Datskos P G 2008 J. Appl. Phys. 104 051508

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