The design and preparation of novel quantum materials with atomic precision are crucial for exploring new physics and for device applications. Electron irradiation has been demonstrated as an effective method for preparing novel quantum materials and quantum structures that could be challenging to obtain otherwise. It features the advantages of precise control over the patterning of such new materials and their integration with other materials with different functionalities. Here, we present a new strategy for fabricating freestanding monolayer SiC within nanopores of a graphene membrane. By regulating the energy of the incident electron beam and the in-situ heating temperature in a scanning transmission electron microscope (STEM), we can effectively control the patterning of nanopores and subsequent growth of monolayer SiC within the graphene lattice. The resultant SiC monolayers seamlessly connect with the graphene lattice, forming a planar structure distinct by a wide direct bandgap. Our in-situ STEM observations further uncover that the growth of monolayer SiC within the graphene nanopore is driven by a combination of bond rotation and atom extrusion, providing new insights into the atom-by-atom self-assembly of freestanding two-dimensional (2D) monolayers.

Transmission electron microscopy (TEM) offers unparalleled atomic-resolution imaging of complex materials and heterogeneous structures. However, high-energy imaging electrons can induce structural damage, posing a challenge for electron-beam-sensitive materials. Cryogenic TEM (Cryo-TEM) has revolutionized structural biology, enabling the visualization of biomolecules in their near-native states at unprecedented detail. The low electron dose imaging and stable cryogenic environment in Cryo-TEM are now being harnessed for the investigation of electron-beam-sensitive materials and low-temperature quantum phenomena. Here, we present a systematic review of the interaction mechanisms between imaging electrons and atomic structures, illustrating the electron beam-induced damage and the mitigating role of Cryo-TEM. This review then explores the advancements in low-dose Cryo-TEM imaging for elucidating the structures of organic-based materials. Furthermore, we showcase the application of Cryo-TEM in the study of strongly correlated quantum materials, including the detection of charge order and novel topological spin textures. Finally, we discuss the future prospects of Cryo-TEM, emphasizing its transformative potential in unraveling the complexities of materials and phenomena across diverse scientific disciplines.

One of the major innovations awaiting in electron microscopy is full three-dimensional imaging at atomic resolution. Despite the success of aberration correction to deep sub-ångström lateral resolution, spatial resolution in depth is still far from atomic resolution. In scanning transmission electron microscopy (STEM), this poor depth resolution is due to the limitation of the illumination angle. To overcome this physical limitation, it is essential to implement a next-generation aberration corrector in STEM that can significantly improve the depth resolution. This review discusses the capability of depth sectioning for three-dimensional imaging combined with large-angle illumination STEM. Furthermore, the statistical analysis approach remarkably improves the depth resolution, making it possible to achieve three-dimensional atomic resolution imaging at oxide surfaces. We will also discuss the future prospects of three-dimensional imaging at atomic resolution by STEM depth sectioning.

We present a method using Zernike moments for quantifying rotational and reflectional symmetries in scanning transmission electron microscopy (STEM) images, aimed at improving structural analysis of materials at the atomic scale. This technique is effective against common imaging noises and is potentially suited for low-dose imaging and identifying quantum defects. We showcase its utility in the unsupervised segmentation of polytypes in a twisted bilayer TaS$_2$, enabling accurate differentiation of structural phases and monitoring transitions caused by electron beam effects. This approach enhances the analysis of structural variations in crystalline materials, marking a notable advancement in the characterization of structures in materials science.