Quadruple-stacked Nb/NbxSi1-x/Nb Josephson junctions for large-scale array application

doi:10.1088/1674-1056/ab90e3

Abstract Large-scale Josephson junction (JJ) arrays are essential in many applications, especially quantum voltage standards application for which hundreds of thousands of junctions are required to realize a high quantum voltage. For almost all applications, high-quality JJ arrays must be realized in a small chip area. This study proposes vertically quadruple-stacked Nb/(Nb_xSi_1-x/Nb)₄ JJs to increase the integration density of junctions in an array. The current-voltage (I-V) characteristics of a single stack of Nb/(Nb_xSi_1-x/Nb)₄ JJs have been measured at 4.2 K. The uniformity of junctions in one stack and the uniformity of several stacks over the entire 2 inches wafer have been analyzed. By optimizing the fabrication parameters, a large-scale quadruple-stacked Nb/(Nb_xSi_1-x/Nb)₄ array consisting of 400000 junctions is realized. Good DC I-V characteristics are obtained, indicating the good uniformity of the large-scale array.

Keywords: niobium Josephson junction array voltage standard

Received: 28 April 2020
Accepted manuscript online:

PACS:	74.78.-w	(Superconducting films and low-dimensional structures)
	74.81.Fa	(Josephson junction arrays and wire networks)
	06.20.fb	(Standards and calibration)

Fund: Project supported by the National Key R&D Program of China (Grant No. 2016YFF0200402).

Corresponding Authors: Jinjin Li
E-mail: jinjinli@nim.ac.cn

Cite this article:

Wenhui Cao(曹文会), Jinjin Li(李劲劲), Lanruo Wang(王兰若), Yuan Zhong(钟源), Qing Zhong(钟青) Quadruple-stacked Nb/Nb_xSi_1-x/Nb Josephson junctions for large-scale array application 2020 Chin. Phys. B 29 067404

[1]	Hamilton C A, Lloyd F L, Chieh K and Goeke W C 1989 IEEE Trans. Instrum. Meas. 38 314
[2]	Pöpel R, Niemeyer J, Fromknecht R, Meier W and Grimm L 1990 J. Appl. Phys. 68 4294
[3]	Murayama Y, Sakamoto Y, Iwasa A, Nakanishi M, Yoshida H, Klein U and Endo T 1995 IEEE Trans. Instrum. Meas. 44 219
[4]	Rüfenacht A, Flowers-Jacobs N E and Benz S P 2018 Metrologia 55 S152
[5]	Burroughs C J, Dresselhaus P D, Rufenacht A, Olaya D, Elsbury M M, Tang Y H and Benz S P 2011 IEEE Trans. Instrum. Meas. 60 2482
[6]	Müller F, Scheller T, Wendisch R, Behr R, Kieler O, Palafox L and Kohlmann J 2012 IEEE Trans. Appl. Supercond. 23 1101005
[7]	Yamamori H, Ishizaki M, Shoji A, Dresselhaus P D and Benz S P 2006 Appl. Phys. Lett. 88 042503
[8]	Wang L R, Li J J, Cao W H and Zhong Y 2019 Chin. Phys. B 28 068501
[9]	Hadacek N, Dresselhaus P D, Chong Y, Benz S P and Bonevich J E 2005 IEEE Trans. Appl. Supercond. 15 110
[10]	Cao W H, Li J J, Zhong Y, Gao Y, Li H H, Wang Z M and He Q 2016 Chin. Phys. B 25 057401

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[9]	Magnetic property improvement of niobium doped with rare earth elements Jiang Tao (江涛), He Fei-Si (贺斐思), Jiao Fei (焦飞), He Fa (何法), Lu Xiang-Yang (鲁向阳), Zhao Kui (赵夔), Zhao Hong-Yun (赵红运), You Yu-Song (游雨松), Chen Lin (陈林). Chin. Phys. B, 2014, 23(5): 057403.
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Quadruple-stacked Nb/NbxSi1-x/Nb Josephson junctions for large-scale array application

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Quadruple-stacked Nb/Nb_xSi_1-x/Nb Josephson junctions for large-scale array application