Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

doi:10.1088/1674-1056/25/8/088105

Abstract

Laser-induced damage in fused silica optics greatly restricts the performances of laser facilities. Gray haze damage, which is always initiated on ceria polished optics, is one of the most important damage morphologies in fused silica optics. In this paper, the laser-induced gray haze damages of four fused silica samples polished with CeO₂, Al₂O₃, ZrO₂, and colloidal silica slurries are investigated. Four samples all present gray haze damages with much different damage densities. Then, the polishing-induced contaminant and subsurface damages in four samples are analyzed. The results reveal that the gray haze damages could be initiated on the samples without Ce contaminant and are inclined to show a tight correlation with the shallow subsurface damages.

Keywords: laser-induced damage polishing subsurface damage fused silica

Received: 05 March 2016
Revised: 15 April 2016
Accepted manuscript online:

PACS:	81.15.Fg	(Pulsed laser ablation deposition)
	61.80.Ba	(Ultraviolet, visible, and infrared radiation effects (including laser radiation))
	81.65.Ps	(Polishing, grinding, surface finishing)
	42.70.Ce	(Glasses, quartz)

Corresponding Authors: Ping Ma
E-mail: map@263.net

Cite this article:

Xiang He(何祥), Heng Zhao(赵恒), Gang Wang(王刚), Peifan Zhou(周佩璠), Ping Ma(马平) Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics 2016 Chin. Phys. B 25 088105

[1]	Huang W Q, Han W, Wang F, Xiang Y, Li F Q, Feng B, Jing F, Wei X F, Zheng W G and Zhang X M 2009 Chin. Phys. Lett. 26 017901
[2]	Stuart B C, Feit M D, Rubenchik A M, Shore B W and Perry M D 1995 Phys. Rev. Lett. 74 2248
[3]	Suratwala T, Wong L, Miller P, Feit M D, Menapace J, Steele R, Davis P, and Walmer D 2006 J. Non-Cryst. Solids 352 5601
[4]	Miller P E, Suratwala T I, Wong L L, Feit M D, Menapace J A, Davis P J and Steele R A 2005 Proc. SPIE 5991 599101
[5]	Genin F Y, Sheehan L, Yoshiyama J, Dijon J and Garrec P 1998 Proc. SPIE 3244 155
[6]	Wong J, Ferriera J L, Lindsey E F, Haupt D L, Hutcheon I D and Kinney J H 2006 J. Non-Cryst. Solids 352 255
[7]	Miller P E, Suratwala T I, Bude J D, Laurence T A, Shen N, Steele W A, Feit M D, Menapace J A and Wong L L 2009 Proc. SPIE 7504 75040X
[8]	Miller P E, Bude J D, Suratwala T I, Shen N, Laurence T A, Steele W A, Menapace J, Feit M D and Wong L L 2010 Opt. Lett. 35 2702
[9]	Bercegol H, Grua P, Hebert D and Morreeuw J P 2007 Proc. SPIE 6720 672003
[10]	Genin F Y, Campbell J, Yoshiyama J, Salleo A and Sands T 1998 Proc. SPIE 3244 348
[11]	Camp D W, Kozlowski M R, Sheehan L M, Nichols M, Dovik M, Raether R and Thomas I 1998 Proc. SPIE 3244 356
[12]	Neauport J, Lamaignere L, Bercegol H, Pilon F and Birolleau J C 2005 Opt. Express 13 10163
[13]	Sheehan L M, Kozlowski M and Camp D W 1998 Proc. SPIE 3244 282
[14]	Yoshiyama J, Genin F Y, Salleo A, Thomas I, Kozlowski M R, Sheehan L M, Hutcheon I D and Camp D W 1998 Proc. SPIE 3244 331
[15]	Kozlowski M R, Carr J, Hutcheon I, Torres R, Sheehan L, Camp D and Yan M 1998 Proc. SPIE 3244 365
[16]	Liu H J, Ye X, Zhou X D, Huang J, Wang F R, Zhou X Y, Wu W D, Jiang X D, Sui Z and Zheng W G 2014 Opt. Mater. 36 855
[17]	Suratwala T, Feit M, Steele W, Wong L, Shen N, Dylla-Spears R, Desjardin R, Mason D, Geraghty P, Miller P and Baxamusa S 2014 J. Am. Ceram. Soc. 97 81
[18]	He X, Wang G, Zhao H and Ma P 2016 Chin. Phys. B 25 048104
[19]	Tomozawa M 1997 Solid State Technol. 40 169
[20]	Evans C J, Paul E, Dornfeld D, Lucca D A, Byrne G, Tricard M, Klocke F, Dambon O and Mullany B A 2003 CIRP Ann-Manuf. Technol. 52 611
[21]	Jeng Y R and Huang P Y 2004 Electrochem. Solid State Lett. 7 G40
[22]	Liao D F, Wang J, Zhao S J, Xie R Q, Chen X H, Yuan Z G, Zhong B, Xu X and Zhang S 2014 J. Non-Cryst. Solids 391 96
[23]	Bude J, Miller P, Baxamusa S, Shen N, Laurence T, Steele W, Suratwala T, Wong L, Carr W, Cross D and Monticelli M 2014 Opt. Express 22 5839
[24]	Zhang L, Chen W and Hu L L 2013 Appl. Opt. 52 980
[25]	Feit M D and Rubenchik A M 2004 Proc. SPIE 5273 264
[26]	Zhang C L, Yuan X D, Xiang X, Wang Z G, Liu C M, Li L, He S B and Zu X T 2012 Chin. Phys. B 21 094213
[27]	Li L, Xiang X, Zu X T, Wang H J, Yuan X D, Jiang X D, Zheng W G and Dai W 2011 Chin. Phys. B 20 074209

[1]	Surface defects, stress evolution, and laser damage enhancement mechanism of fused silica under oxygen-enriched condition Wei-Yuan Luo(罗韦媛), Wen-Feng Sun(孙文丰), Bo Li(黎波), Xia Xiang(向霞), Xiao-Long Jiang(蒋晓龙),Wei Liao(廖威), Hai-Jun Wang(王海军), Xiao-Dong Yuan(袁晓东),Xiao-Dong Jiang(蒋晓东), and Xiao-Tao Zu(祖小涛). Chin. Phys. B, 2022, 31(5): 054214.
[2]	Mechanism of titanium-nitride chemical mechanical polishing Dao-Huan Feng(冯道欢), Ruo-Bing Wang(王若冰), Ao-Xue Xu(徐傲雪), Fan Xu(徐帆), Wei-Lei Wang(汪为磊), Wei-Li Liu(刘卫丽), and Zhi-Tang Song(宋志棠). Chin. Phys. B, 2021, 30(2): 028301.
[3]	Optical modulation of repaired damage site on fused silica produced by CO₂ laser rapid ablation mitigation Chao Tan(谭超), Lin-Jie Zhao(赵林杰), Ming-Jun Chen(陈明君), Jian Cheng(程健), Zhao-Yang Yin(尹朝阳), Qi Liu(刘启), Hao Yang(杨浩), Wei Liao(廖威). Chin. Phys. B, 2020, 29(5): 054209.
[4]	Time-dependent photothermal characterization on damage of fused silica induced by pulsed 355-nm laser with high repetition rate Chun-Yan Yan(闫春燕), Bao-An Liu(刘宝安), Xiang-Cao Li(李香草), Chang Liu(刘畅), Xin Ju(巨新). Chin. Phys. B, 2020, 29(2): 027901.
[5]	Damage characteristics of laser plasma shock wave on rear surface of fused silica glass Xiong Shen(沈雄), Guo-Ying Feng(冯国英), Sheng Jing(景晟), Jing-Hua Han(韩敬华), Ya-Guo Li(李亚国), Kai Liu(刘锴). Chin. Phys. B, 2019, 28(8): 085202.
[6]	Laser-induced damage threshold in HfO₂/SiO₂ multilayer films irradiated by β-ray Mei-Hua Fang(方美华), Peng-Yu Tian(田鹏宇), Mao-Dong Zhu(朱茂东), Hong-Ji Qi(齐红基), Tao Fei(费涛), Jin-Peng Lv(吕金鹏), Hui-Ping Liu(刘会平). Chin. Phys. B, 2019, 28(2): 024215.
[7]	Experimental demonstration of narrow-band rugate minus filters using rapidly alternating deposition technology Ying Zhang(章瑛), Yan-Zhi Wang(王胭脂), Jiao-Ling Zhao(赵娇玲), Jian-Da Shao(邵建达), Shuang-Chen Ruan(阮双琛). Chin. Phys. B, 2018, 27(5): 054217.
[8]	Intense supercontinuum generation in the near-ultraviolet range from a 400-nm femtosecond laser filament array in fused silica Dongwei Li(李东伟), Lanzhi Zhang(张兰芝), Saba Zafar, He Song(宋鹤), Zuoqiang Hao(郝作强), Tingting Xi(奚婷婷), Xun Gao(高勋), Jingquan Lin(林景全). Chin. Phys. B, 2017, 26(7): 074213.
[9]	Improvement of laser damage thresholds of fused silica by ultrasonic-assisted hydrofluoric acid etching Yuan Li(李源), Hongwei Yan(严鸿维), Ke Yang(杨科), Caizhen Yao(姚彩珍), Zhiqiang Wang(王志强), Chunyan Yan(闫春燕), Xinshu Zou(邹鑫书), Xiaodong Yuan(袁晓东), Liming Yang(杨李茗), Xin Ju(巨新). Chin. Phys. B, 2017, 26(11): 118104.
[10]	Damage threshold influenced by polishing imperfection distribution under 355-nm laser irradiation Zhen Yu(余振), Hong-Ji Qi(齐红基), Wei-Li Zhang(张伟丽), Hu Wang(王虎), Bin Wang(王斌), Yue-Liang Wang(王岳亮), Hao-Peng Huang(黄昊鹏). Chin. Phys. B, 2017, 26(10): 104210.
[11]	Stable structure and optical properties of fused silica with NBOHC-E' defect Peng-Fei Lu(芦鹏飞), Li-Yuan Wu(伍力源), Yang Yang(杨阳), Wei-Zheng Wang(王唯正), Chun-Fang Zhang(张春芳), Chuang-Hua Yang(杨创华), Rui Su(苏锐), Jun Chen(陈军). Chin. Phys. B, 2016, 25(8): 086801.
[12]	A nano-scale mirror-like surface of Ti-6Al-4V attained by chemical mechanical polishing Chenliang Liang(梁晨亮), Weili Liu(刘卫丽), Shasha Li(李沙沙), Hui Kong(孔慧), Zefang Zhang(张泽芳), Zhitang Song(宋志棠). Chin. Phys. B, 2016, 25(5): 058301.
[13]	Subsurface defect characterization and laser-induced damage performance of fused silica optics polished with colloidal silica and ceria Xiang He(何祥), Gang Wang(王刚), Heng Zhao(赵恒), Ping Ma(马平). Chin. Phys. B, 2016, 25(4): 048104.
[14]	Polydisperse spherical colloidal silica particles: Preparation and application Hui Kong(孔慧), Junchao Huo(霍军朝), Chenliang Liang(梁晨亮), Shasha Li(李沙沙), Weili Liu(刘卫丽), Zhitang Song(宋志棠). Chin. Phys. B, 2016, 25(11): 118202.
[15]	Influence of secondary treatment with CO₂ laser irradiation for mitigation site on fused silica surface Yong Jiang(蒋勇), Qiang Zhou(周强), Rong Qiu(邱荣), Xiang Gao(高翔), Hui-Li Wang(王慧丽), Cai-Zhen Yao(姚彩珍), Jun-Bo Wang(王俊波), Xin Zhao(赵鑫), Chun-Ming Liu(刘春明), Xia Xiang(向霞), Xiao-Tao Zu(祖小涛), Xiao-Dong Yuan(袁晓东), Xin-Xiang Miao(苗心向). Chin. Phys. B, 2016, 25(10): 108104.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

Cite this article:

Online attention