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Chinese Physics, 2006, Vol. 15(2): 389-393    DOI: 10.1088/1009-1963/15/2/026
CLASSICAL AREAS OF PHENOMENOLOGY Prev   Next  

Self-assembled germanium nano-structures by laser-assisted oxidation

Huang Wei-Qi (黄伟其)acd, Liu Shi-Rong (刘世荣)b
a Department of Physics, Guizhou University, Guiyang 550026, Chinab Institute of Geochemistry, Chinese Academy of Sciences, Guiyang 550003, Chinac Department of Physics, Guizhou Educational College, Guiyang 550003, China; d Optoelectronics Physics Lab, Guizhou University, Guiyang 550026, China
Abstract  The investigation on the oxidation behaviour of Si$_{1-x}$Ge$_{x}$ alloys ($x$=0.05, 0.15, and 0.25) is carried out. It is found for the first time that on the oxide film a germanium nano-cap with a thickness of 1.8--2.8nm and a few Ge nanoparticles with diameters ranging from 5.5 nm to 10 nm are formed by the low-temperature laser-assisted dry oxidation of Si$_{1 - x}$Ge$_{x}$ substrate. A new scanning method on the decline cross-section of the multiple-layer sample is adopted to measure the layer thickness and the composition. Some new peaks in photoluminescence (PL) spectra are discovered, which could be related to the nano-cap and the nano-particles of germanium. A suitable model and several new calculating formulae with the unrestricted Hartree--Fock--Roothaan (UHFR) method and quantum confinement analysis are proposed to interpret the PL spectra and the nano-structure mechanism in the oxide.
Keywords:  low-temperature oxidation      laser-assisted      nano-structure      PL spectra  
Received:  20 April 2005      Revised:  08 October 2005      Accepted manuscript online: 
PACS:  81.65.Mq (Oxidation)  
  78.55.Hx (Other solid inorganic materials)  
  78.67.Bf (Nanocrystals, nanoparticles, and nanoclusters)  
  78.66.-w (Optical properties of specific thin films)  
  68.55.-a (Thin film structure and morphology)  
  68.55.Nq (Composition and phase identification)  
Fund: Project supported by the Natural Science Foundation of Guizhou Province, China (Grant No 3067(2004)).

Cite this article: 

Huang Wei-Qi (黄伟其), Liu Shi-Rong (刘世荣) Self-assembled germanium nano-structures by laser-assisted oxidation 2006 Chinese Physics 15 389

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