Influence of Zr50Cu50 thin film metallic glass as buffer layer on the structural and optoelectrical properties of AZO films

doi:10.1088/1674-1056/ab6c50

Abstract Aluminum-doped ZnO (AZO) thin films with thin film metallic glass of Zr₅₀Cu₅₀ as buffer are prepared on glass substrates by the pulsed laser deposition. The influence of buffer thickness and substrate temperature on structural, optical, and electrical properties of AZO thin film are investigated. Increasing the thickness of buffer layer and substrate temperature can both promote the transformation of AZO from amorphous to crystalline structure, while they show (100) and (002) unique preferential orientations, respectively. After inserting Zr₅₀Cu₅₀ layer between the glass substrate and AZO film, the sheet resistance and visible transmittance decrease, but the infrared transmittance increases. With substrate temperature increasing from 25 ℃ to 520 ℃, the sheet resistance of AZO(100 nm)/ Zr₅₀Cu₅₀(4 nm) film first increases and then decreases, and the infrared transmittance is improved. The AZO(100 nm)/Zr₅₀Cu₅₀(4 nm) film deposited at a substrate temperature of 360 ℃ exhibits a low sheet resistance of 26.7 Ω/□, high transmittance of 82.1% in the visible light region, 81.6% in near-infrared region, and low surface roughness of 0.85 nm, which are useful properties for their potential applications in tandem solar cell and infrared technology.

Keywords: aluminum-doped ZnO (AZO) Zr₅₀Cu₅₀ thin film metallic glass optoelectrical properties morphology

Received: 29 December 2019
Revised: 10 January 2020
Accepted manuscript online:

PACS:	73.21.Ac	(Multilayers)
	42.70.-a	(Optical materials)
	68.55.-a	(Thin film structure and morphology)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 51571085), the Key Science and Technology Program of Henan Province, China (Grant No. 19212210210), the Foundation of Henan Educational Committee, China (Grant No. 13B430019), and the Henan Postdoctoral Science Foundation, China.

Corresponding Authors: Hai-Tao Zong, Guo-Hua Cao
E-mail: haitaozong@163.com;ghcao@hpu.edu.cn

Cite this article:

Bao-Qing Zhang(张宝庆), Gao-Peng Liu(刘高鹏), Hai-Tao Zong(宗海涛), Li-Ge Fu(付丽歌), Zhi-Fei Wei(魏志飞), Xiao-Wei Yang(杨晓炜), Guo-Hua Cao(曹国华) Influence of Zr₅₀Cu₅₀ thin film metallic glass as buffer layer on the structural and optoelectrical properties of AZO films 2020 Chin. Phys. B 29 037303

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Influence of Zr50Cu50 thin film metallic glass as buffer layer on the structural and optoelectrical properties of AZO films

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Influence of Zr₅₀Cu₅₀ thin film metallic glass as buffer layer on the structural and optoelectrical properties of AZO films