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Chinese Physics, 2000, Vol. 9(7): 537-540    DOI: 10.1088/1009-1963/9/7/013
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

FABRICATION AND CHARACTERIZATION OF THE SIZE-CONTROLLED AND PATTERNED nc-Si DOTS

Li Jian (李健), Wang Li (王立), Huang Xin-fan (黄信凡), Jiang Ming (蒋明), Li Wei (李伟), Wang Zhao-ye (王朝晔), Xu Jun (徐骏), Liu Zhi-guo (刘治国), Chen Kun-ji (陈坤基)
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China
Abstract  A new method of phase-modulated excimer laser crystallization is adopted to fabricate the patterned nanometer-sized crystalline silicon (nc-Si) dots within the sandwiched structure (a-SiNx:H/a-Si:H/a-SiNx:H) films. The results of transmission electron microscopy, electron diffraction and Raman scattering show the ultra-thin and single-layer nc-Si films were patterned in the lateral direction and the size of crystallites is controlled by the thickness of as-deposited a-Si film in the longitudinal direction. The effects of the laser energy density on the structures of the samples and the crystallization mechanism are discussed.
Keywords:  nanocrystalline silicon      constrained crystallization      laser-induced crystallization      sandwiched structure  
Received:  06 January 2000      Revised:  13 March 2000      Accepted manuscript online: 
PACS:  42.55.Lt (Gas lasers including excimer and metal-vapor lasers)  
  61.46.Hk (Nanocrystals)  
  68.55.-a (Thin film structure and morphology)  
  78.30.Am (Elemental semiconductors and insulators)  
  78.66.Db (Elemental semiconductors and insulators)  
  81.16.Rf (Micro- and nanoscale pattern formation)  
Fund: Project supported by the National Natural Science Foundation of China(Grant Nos. 69876019, 69676008 and 69890225) and by the Natural Science Foundation of Jiangsu Province (Grant No. BK97021).

Cite this article: 

Li Jian (李健), Wang Li (王立), Huang Xin-fan (黄信凡), Jiang Ming (蒋明), Li Wei (李伟), Wang Zhao-ye (王朝晔), Xu Jun (徐骏), Liu Zhi-guo (刘治国), Chen Kun-ji (陈坤基) FABRICATION AND CHARACTERIZATION OF THE SIZE-CONTROLLED AND PATTERNED nc-Si DOTS 2000 Chinese Physics 9 537

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