Abstract We report the study on a short wavelength-tunable vertical-cavity surface-emitting laser utilizing a monolithically integrated bridge tuning microelectromechanical system. A deformable-bridge top mirror suspended above an active region is utilized. Applied bridge-substrate bias produces an electrostatic force which reduces the spacing of air-gap and tunes the resonant wavelength toward a shorter wavelength (blue-shift). Good laser characteristics are obtained: such as continuous tuning ranges over 11 nm near 940 nm for 0--9 V tuning bias, the peak output power near 1 mW and the full-width-half-maximum limited to approximately 3.2--6.8 nm. A detailed simulation of the micromechanical and optical characteristics of these devices is performed, and the ratio of bridge displacement to wavelength shift has been found to be 3:1.
Received: 09 January 2006
Revised: 19 July 2006
Accepted manuscript online:
(Resonators, cavities, amplifiers, arrays, and rings)
Fund: Project supported by the National Natural Science
Foundation of China (Grant No 60506012), the Fok Ying-Tong Foundation (Grant
No 101062), the Natural Science Foundation of Beijing China (Grant No
KZ200510005003), the Science Star of Beijing China (Grant
Cite this article:
Guan Bao-Lu(关宝璐), Guo Xia(郭霞), Deng Jun(邓军), Qu Hong-Wei(渠红伟), Lian Peng(廉鹏), Dong Li-Min(董立敏), Chen Min(陈敏), and Shen Guang-Di(沈光地) Micromechanical tunable vertical-cavity surface-emitting lasers 2006 Chinese Physics 15 2959
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