Characterization of the high-voltage pulsed discharge plasma of ammonia by emission spectroscopy
Yang Wei-Dong (杨炜东), Wang Pei-Nan (王培南), Liu Zheng-Ping (刘征平), Mi Lan (糜岚), Li Fu-Ming (李富铭)
State Key Laboratory for Advanced Photonic Materials and Devices, Department of Optical Science and Engineering, School of Information, Fudan University, Shanghai 200433, China
Abstract We have used optical emission spectroscopy to characterize the high-voltage pulsed discharge of ammonia. Ammonia was highly dissociated in the discharge at low pressures. More atomic nitrogen was generated as compared to the discharge of nitrogen gas at the same pressure of 0.8kPa. We discuss the elimination of the oxygen impurity in the ammonia discharge, and we estimate the time-dependent atomic excitation temperature and the electron density from the measured spectra.
Received: 05 May 2001
Revised: 07 August 2001
Accepted manuscript online:
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos 69978005, 29890216 and 10075012).
Cite this article:
Yang Wei-Dong (杨炜东), Wang Pei-Nan (王培南), Liu Zheng-Ping (刘征平), Mi Lan (糜岚), Li Fu-Ming (李富铭) Characterization of the high-voltage pulsed discharge plasma of ammonia by emission spectroscopy 2002 Chinese Physics 11 260
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