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Acta Physica Sinica (Overseas Edition), 1993, Vol. 2(9): 702-710    DOI: 10.1088/1004-423X/2/9/009
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev  

INVESTIGATION OF ION SPUTTERING FOR EUTECTIC Cu-37 at% Ag ALLOY

WANG ZHEN-XIA (王震遐)a, PAN JI-SHENG (潘冀生)a, ZHANG JI-PING (章骥平)a, TAO ZHEN-LAN (陶振兰)a, ZHU FU-YING (朱福英)a, ZHAO LIE (赵烈)b, ZHANG HUI-MING (张慧明)b
a Institute of Nuclear Research, Academia Sinica, Shanghai 201800, China; b Center Laboratory, Hangzhou University, Hangzhou 310028, China
Abstract  Angular distribution of sputtered atoms and the phenomenon of "element local richness relative to microtopographic feature" (ELR-MTF) of the sputtered tar-get surface have been investigated on Cu-37at%Ag alloys by means of Rutherford backscattering spectroscopy technique and a method based on combined scanning electron microscopy and electron probe microanalysis measurements. In this paper, emphasis is put on the bombardment with different doses and angular distributions of sputtered atoms ejecting from various micro-zones on the topographic surface during sputtering. We propose a new model (ELR-MTF model) to interpret the shape of angular distributions and the variation of R-$\theta$ (ejection angle of sputtered atoms) curves. This model can qualitatively explain the experiment quite well.
Received:  16 July 1992      Accepted manuscript online: 
PACS:  68.49.Sf (Ion scattering from surfaces (charge transfer, sputtering, SIMS))  
  68.37.Hk (Scanning electron microscopy (SEM) (including EBIC))  
Fund: Project supported by the National Natural Science Foundation of China.

Cite this article: 

WANG ZHEN-XIA (王震遐), PAN JI-SHENG (潘冀生), ZHANG JI-PING (章骥平), TAO ZHEN-LAN (陶振兰), ZHU FU-YING (朱福英), ZHAO LIE (赵烈), ZHANG HUI-MING (张慧明) INVESTIGATION OF ION SPUTTERING FOR EUTECTIC Cu-37 at% Ag ALLOY 1993 Acta Physica Sinica (Overseas Edition) 2 702

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