Please wait a minute...
Chin. Phys. B, 2020, Vol. 29(6): 067404    DOI: 10.1088/1674-1056/ab90e3
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

Quadruple-stacked Nb/NbxSi1-x/Nb Josephson junctions for large-scale array application

Wenhui Cao(曹文会), Jinjin Li(李劲劲), Lanruo Wang(王兰若), Yuan Zhong(钟源), Qing Zhong(钟青)
National Institute of Metrology, Beijing 100029, China
Abstract  Large-scale Josephson junction (JJ) arrays are essential in many applications, especially quantum voltage standards application for which hundreds of thousands of junctions are required to realize a high quantum voltage. For almost all applications, high-quality JJ arrays must be realized in a small chip area. This study proposes vertically quadruple-stacked Nb/(NbxSi1-x/Nb)4 JJs to increase the integration density of junctions in an array. The current-voltage (I-V) characteristics of a single stack of Nb/(NbxSi1-x/Nb)4 JJs have been measured at 4.2 K. The uniformity of junctions in one stack and the uniformity of several stacks over the entire 2 inches wafer have been analyzed. By optimizing the fabrication parameters, a large-scale quadruple-stacked Nb/(NbxSi1-x/Nb)4 array consisting of 400000 junctions is realized. Good DC I-V characteristics are obtained, indicating the good uniformity of the large-scale array.
Keywords:  niobium      Josephson junction array      voltage standard  
Received:  28 April 2020      Accepted manuscript online: 
PACS:  74.78.-w (Superconducting films and low-dimensional structures)  
  74.81.Fa (Josephson junction arrays and wire networks)  
  06.20.fb (Standards and calibration)  
Fund: Project supported by the National Key R&D Program of China (Grant No. 2016YFF0200402).
Corresponding Authors:  Jinjin Li     E-mail:  jinjinli@nim.ac.cn

Cite this article: 

Wenhui Cao(曹文会), Jinjin Li(李劲劲), Lanruo Wang(王兰若), Yuan Zhong(钟源), Qing Zhong(钟青) Quadruple-stacked Nb/NbxSi1-x/Nb Josephson junctions for large-scale array application 2020 Chin. Phys. B 29 067404

[1] Hamilton C A, Lloyd F L, Chieh K and Goeke W C 1989 IEEE Trans. Instrum. Meas. 38 314
[2] Pöpel R, Niemeyer J, Fromknecht R, Meier W and Grimm L 1990 J. Appl. Phys. 68 4294
[3] Murayama Y, Sakamoto Y, Iwasa A, Nakanishi M, Yoshida H, Klein U and Endo T 1995 IEEE Trans. Instrum. Meas. 44 219
[4] Rüfenacht A, Flowers-Jacobs N E and Benz S P 2018 Metrologia 55 S152
[5] Burroughs C J, Dresselhaus P D, Rufenacht A, Olaya D, Elsbury M M, Tang Y H and Benz S P 2011 IEEE Trans. Instrum. Meas. 60 2482
[6] Müller F, Scheller T, Wendisch R, Behr R, Kieler O, Palafox L and Kohlmann J 2012 IEEE Trans. Appl. Supercond. 23 1101005
[7] Yamamori H, Ishizaki M, Shoji A, Dresselhaus P D and Benz S P 2006 Appl. Phys. Lett. 88 042503
[8] Wang L R, Li J J, Cao W H and Zhong Y 2019 Chin. Phys. B 28 068501
[9] Hadacek N, Dresselhaus P D, Chong Y, Benz S P and Bonevich J E 2005 IEEE Trans. Appl. Supercond. 15 110
[10] Cao W H, Li J J, Zhong Y, Gao Y, Li H H, Wang Z M and He Q 2016 Chin. Phys. B 25 057401
[1] Wavelength dependence of intrinsic detection efficiency of NbN superconducting nanowire single-photon detector
Yong Wang(王勇), Hao Li(李浩), Li-Xing You(尤立星), Chao-Lin Lv(吕超林), He-Qing Wang(王河清), Xing-Yu Zhang(张兴雨), Wei-Jun Zhang(张伟君), Hui Zhou(周慧), Lu Zhang(张露), Xiao-Yan Yang(杨晓燕), Zhen Wang(王镇). Chin. Phys. B, 2019, 28(7): 078502.
[2] Development of 0.5-V Josephson junction array devices for quantum voltage standards
Lanruo Wang(王兰若), Jinjin Li(李劲劲), Wenhui Cao(曹文会), Yuan Zhong(钟源), Zhonghua Zhang(张钟华). Chin. Phys. B, 2019, 28(6): 068501.
[3] Simulation and measurement of millimeter-wave radiation from Josephson junction array
Xin Zhang(张鑫), Sheng-Hui Zhao(赵生辉), Li-Tian Wang(王荔田), Jian Xing(邢建), Sheng-Fang Zhang(张胜芳), Xue-Lian Liang(梁雪连), Ze He(何泽), Pei Wang(王培), Xin-Jie Zhao(赵新杰), Ming He(何明), Lu Ji(季鲁). Chin. Phys. B, 2019, 28(6): 060305.
[4] Unusual softening behavior of yield strength in niobium at high pressures
Qiu-Min Jing(敬秋民), Qiang He(何强), Yi Zhang(张毅), Shou-Rui Li(李守瑞), Lei Liu(柳雷), Qi-Yue Hou(侯琪玥), Hua-Yun Geng(耿华运), Yan Bi(毕延), Yu-Ying Yu(俞宇颖), Qiang Wu(吴强). Chin. Phys. B, 2018, 27(10): 106201.
[5] Developing Josephson junction array chips for microvolt applications
Wenhui Cao(曹文会), Jinjin Li(李劲劲), Yuan Zhong(钟源), Yuan Gao(高原), Honghui Li(李红晖), Zengmin Wang(王曾敏), Qing He(贺青). Chin. Phys. B, 2016, 25(5): 057401.
[6] Effect of deposition parameters on structural and mechanicalproperties of niobium nitride synthesized by plasma focus device
Jamil Siddiqui, Tousif Hussain, Riaz Ahmad, Nida Khalid. Chin. Phys. B, 2015, 24(6): 065204.
[7] Tunable coplanar waveguide resonator with nanowires
Zhou Yu (周渝), Jia Tao (郏涛), Zhai Ji-Quan (翟计全), Wang Cheng (汪橙), Zhong Xian-Qian (钟先茜), Cao Zhi-Min (曹志敏), Sun Guo-Zhu (孙国柱), Kang Lin (康琳), Wu Pei-Heng (吴培亨). Chin. Phys. B, 2015, 24(4): 047403.
[8] Study of Nb/NbxSi1-x/Nb Josephson junction arrays
Cao Wen-Hui (曹文会), Li Jin-Jin (李劲劲), Zhong Yuan (钟源), He Qing (贺青). Chin. Phys. B, 2015, 24(12): 127402.
[9] Magnetic property improvement of niobium doped with rare earth elements
Jiang Tao (江涛), He Fei-Si (贺斐思), Jiao Fei (焦飞), He Fa (何法), Lu Xiang-Yang (鲁向阳), Zhao Kui (赵夔), Zhao Hong-Yun (赵红运), You Yu-Song (游雨松), Chen Lin (陈林). Chin. Phys. B, 2014, 23(5): 057403.
[10] MEASUREMENT OF L-SHELL IONIZATION CROSS SECTIONS FOR NIOBIUM BY ELECTRON IMPACT
Peng Xiu-feng (彭秀峰), He Fu-qing (何福庆), Long Xian-guan (龙先灌), An Zhu (安竹), Luo Zheng-ming (罗正明). Chin. Phys. B, 2001, 10(1): 31-34.
No Suggested Reading articles found!