Nb5N6 microbolometer array for terahertz detection

doi:10.1088/1674-1056/22/4/040701

Abstract A novel room-temperature microbolometer array chip consisting of an Nb₅N₆ thin film microbridge and a dipole planar antenna, which is used as a terahertz (THz) detector is described in this paper. Due to the high temperature coefficient of the resistance, which is as high as -0.7% K^-1, of the Nb₅N₆ thin film, such an antenna-coupled microbolometer is ideal for detecting signals in a frequency range from 0.22 THz to 0.33 THz. The dc responsivity, calculated from the measured I-V curve of the Nb₅N₆ microbolometer, is about -760 V/W at a bias current of 0.19 mA. A typical noise voltage as low as 10 nV/Hz^1/2 yields a low noise equivalent power (NEP) of 1.3×10^-11 W/Hz^1/2 at a modulation frequency above 4 kHz, and the best RF responsivity, characterized using infrared device measuring method, is about 580 V/W, with the corresponding NEP being 1.7× 10^-11 W/Hz^1/2. In order to further test the performance of Nb₅N₆ microbolometer, we construct a quasi-optical type receiver by attaching it to the hyperhemispherical silicon lens, and the result is that the best responsivity of the receiver is up to 320 V/W. This work could offer another way to develop a large scale focal plane array in silicon with simple technique and low cost.

Keywords: Nb₅N₆ microbolometer responsivity noise equivalent power

Received: 09 August 2012
Revised: 28 September 2012
Accepted manuscript online:

PACS:	07.57.Kp	(Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors)
	07.57.-c	(Infrared, submillimeter wave, microwave and radiowave instruments and equipment)

Fund: Project supported by the National Basic Research Program of China (Grant No. 2011CBA00107) and the National High-Technology Research Development Program of China (Grant No. 2011AA010204).

Corresponding Authors: Kang Lin
E-mail: kanglin@nju.edu.cn

Cite this article:

Tu Xue-Cou (涂学凑), Kang Lin (康琳), Liu Xin-Hua (刘新华), Mao Qing-Kai (毛庆凯), Wan Chao (万超), Chen Jian (陈健), Jin Biao-Bing (金飚兵), Ji Zheng-Ming (吉争鸣), Xu Wei-Wei (许伟伟), Wu Pei-Heng (吴培亨) Nb₅N₆ microbolometer array for terahertz detection 2013 Chin. Phys. B 22 040701

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Nb5N6 microbolometer array for terahertz detection

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Nb₅N₆ microbolometer array for terahertz detection