Chin. Phys. B
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Chin. Phys. B  2013, Vol. 22 Issue (4): 040701    DOI: 10.1088/1674-1056/22/4/040701
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Nb5N6 microbolometer array for terahertz detection
Tu Xue-Cou, Kang Lin, Liu Xin-Hua, Mao Qing-Kai, Wan Chao, Chen Jian, Jin Biao-Bing, Ji Zheng-Ming, Xu Wei-Wei, Wu Pei-Heng
School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China

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