Tribological properties of diamond-like carbon films deposited by pulsed laser arc deposition
Zhang Zhen-Yu(张振宇)a)b)† , Lu Xin-Chun(路新春)a), and Luo Jian-Bin(雒建斌)a)
a State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China; b Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
Abstract A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon (DLC) nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp$^{2}$, sp$^{3}$ and C--O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17--21 nm, 30--57 nm, 67--123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17--41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.
Fund: Project supported by the National Key Basic Research Program of China (Grant
No~2003CB716201), the Major Research Plan of the National Natural Science
Foundation of China (Grant No~50390060), the National Natural Science
Foundation of China (Grant No~5057
Cite this article:
Zhang Zhen-Yu(张振宇), Lu Xin-Chun(路新春), and Luo Jian-Bin(雒建斌) Tribological properties of diamond-like carbon films deposited by pulsed laser arc deposition 2007 Chinese Physics 16 3790
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