Discharge mode and particle transport in radio frequency capacitively coupled Ar/O2 plasma discharges

doi:10.1088/1674-1056/ad5d65

Abstract Simulations are conducted on capacitively coupled Ar/O$_{2}$ mixed gas discharges employing a one-dimensional fluid coupled with an electron Monte Carlo (MC) model. The research explores the impact of different O$_{2}$ ratio and pressures on the discharge characteristics of Ar/O$_{2}$ plasma. At a fixed Ar/O$_{2}$ gas ratio, with the increasing pressure, higher ion densities, as well as a slight increase in electron density in the bulk region can be observed. The discharge remains dominated by the drift-ambipolar (DA) mode, and the flux of O($^{3}$P) at the electrode increases with the increasing pressure due to higher background gas density, while the fluxes of O($^{1}$D) and Ar$^{\ast }$ decrease due to the pronounced loss rate. With the increasing proportion of O$_{2}$, a change in the dominant discharge mode from $\alpha $ mode to DA mode can be detected, and the O$_{2}$-associated charged particle densities are significantly increased. However, Ar$^{+}$ density shows a trend of increasing and then decreasing, while for neutral fluxes at the electrode, Ar$^{\ast }$ flux decreases, and O($^{3}$P) flux increases with the reduced Ar gas proportion, while trends in O($^{1}$D) flux show slight differences. The evolution of the densities of the charged particle and the neutral fluxes under different discharge parameters are discussed in detail using the ionization characteristics as well as the transport properties. Hopefully, more comprehensive understanding of Ar/O$_{2}$ discharge characteristics in this work will provide a valuable reference for the industry.

Keywords: Ar/O$_{2}$ mixed gas discharges electron dynamics transport of charged and neutral particles

Received: 31 March 2024
Revised: 27 June 2024
Accepted manuscript online: 01 July 2024

PACS:	52.65.-y	(Plasma simulation)
	52.65.Ww	(Hybrid methods)
	52.80.Pi	(High-frequency and RF discharges)
	52.27.Cm	(Multicomponent and negative-ion plasmas)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 12020101005, 11975067, and 12347131) and the Fundamental Research Funds for the Central Universities (Grant No. DUT24BS069).

Corresponding Authors: Yuan-Hong Song
E-mail: songyh@dlut.edu.cn

Cite this article:

Zhuo-Yao Gao(高卓瑶), Wan Dong(董婉), Chong-Biao Tian(田崇彪), Xing-Zhao Jiang(蒋星照), Zhong-Ling Dai(戴忠玲), and Yuan-Hong Song(宋远红) Discharge mode and particle transport in radio frequency capacitively coupled Ar/O₂ plasma discharges 2024 Chin. Phys. B 33 095203

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Discharge mode and particle transport in radio frequency capacitively coupled Ar/O2 plasma discharges

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Discharge mode and particle transport in radio frequency capacitively coupled Ar/O₂ plasma discharges