| INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
Prev
Next
|
|
|
MOS-based model of four-transistor CMOS image sensor pixels for photoelectric simulation |
| Bing Zhang(张冰)1,2,†, Congzhen Hu(胡从振)1,2, Youze Xin(辛有泽)1,2, Yaoxin Li(李垚鑫)1,2, Zhuoqi Guo(郭卓奇)1,2, Zhongming Xue(薛仲明)1,2, Li Dong(董力)1,2, Shanzhe Yu(于善哲)3, Xiaofei Wang(王晓飞)1,2, Shuyu Lei(雷述宇)4, and Li Geng(耿莉)1,2 |
1 School of Microelectronics, Xi'an Jiaotong University, Xi'an 710049, China;
2 Key Laboratory of Micro-nano Electronics and System Integration of Xi'an City, Xi'an 710049, China;
3 National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China;
4 ABAX Sensing Inc., Ningbo 315500, China |
|
|
|
|
Abstract By using the MOS-based model established in this paper, the physical process of photoelectron generation, transfer, and storage in the four-transistor active pixel sensor (4T-APS) pixels can be simulated in SPICE environment. The variable capacitance characteristics of double junctions in pinned photodiodes (PPDs) and the threshold voltage difference formed by channel nonuniform doping in transfer gates (TGs) are considered with this model. The charge transfer process of photogenerated electrons from PPDs to the floating diffusion (FD) is analyzed, and the function of nonuniform doping of TGs in suppressing charge injection back to PPDs is represented with the model. The optical and electrical characteristics of all devices in the pixel are effectively combined with the model. Moreover, the charge transfer efficiency and the voltage variation in PPD can be described with the model. Compared with the hybrid simulation in TCAD and the Verilog-A simulation in SPICE, this model has higher simulation efficiency and accuracy, respectively. The effectiveness of the MOS-based model is experimentally verified in a 3 μ m test pixel designed in 0.11 μm CIS process.
|
Received: 09 September 2021
Revised: 04 November 2021
Accepted manuscript online:
|
|
PACS:
|
85.30.-z
|
(Semiconductor devices)
|
|
| Fund: Project supported by the National Natural Science Foundation of China (Grant No.61874085) and the Postdoctoral Research Funding Project of Shaanxi Province,China (Grant No.2018BSHEDZZ41). |
Corresponding Authors:
Bing Zhang,E-mail:bing_zhang1982@xjtu.edu.cn
E-mail: bing_zhang1982@xjtu.edu.cn
|
| About author: 2021-11-10 |
Cite this article:
Bing Zhang(张冰), Congzhen Hu(胡从振), Youze Xin(辛有泽), Yaoxin Li(李垚鑫), Zhuoqi Guo(郭卓奇), Zhongming Xue(薛仲明), Li Dong(董力), Shanzhe Yu(于善哲), Xiaofei Wang(王晓飞), Shuyu Lei(雷述宇), and Li Geng(耿莉) MOS-based model of four-transistor CMOS image sensor pixels for photoelectric simulation 2022 Chin. Phys. B 31 058503
|
[1] Inoue I, Tanaka N, Yamashita H, Yamaguchi T, Ishiwata H and Ihara H 2003 IEEE Trans. Electron. Dev. 50 43
[2] Senda K, Terakawa S, Hiroshima Y and Kunii T 1984 IEEE Trans. Electron. Dev. 31 1324
[3] Fossum E R and Hondongwa D B 2014 IEEE J. Electron Dev. Soc. 2 33
[4] Hagiwara T 1996 IEEE Trans. Electron. Dev. 43 2122
[5] Pelamatti A, Goiffon V, Estribeau M, Cervantes P and Magnan P 2013 IEEE Electron Dev. Lett. 34 900
[6] Marcelot O, Goiffon V, Nallet F and Magnan P 2016 IEEE Trans. Electron. Dev. 64 455
[7] Rizzolo S, Goiffon V, Estribeau M, Marcelot O, Martin G P and Magnan P 2018 IEEE Trans. Electron. Dev. 65 1048
[8] Sun Y, Zhang P, Xu J T Gao Z Y and Xu C 2012 Chin. J. Semicond. 33 124004
[9] Cao S, Zhang B, Li X, Wu L S and Wang J F 2014 Chin. J. Semicond. 35 114009
[10] Bonjour L, Blanc N and Kayal M 2012 IEEE Electron. Dev. Lett. 33 1735
[11] Teranishi N, Kohono A, Ishihara Y, Oda E and Arai K 1982 International Electron Devices Meeting, December 13-15, 1982, San Francisco, USA, p. 324
[12] Sarkar M, Buttgen B and Theuwissen A 2013 IEEE Trans. Electron. Dev. 60 1154
[13] Lavine J P and Banghart E K 1997 IEEE Trans. Electron. Dev. 44 1593
[14] Han L Q, Yao S Y and Theuwissen A J P 2016 IEEE Trans. Electron. Dev. 63 32
[15] Mutoh H 2003 IEEE Trans. Electron. Dev. 50 19
[16] Mheen B, Song Y J and Theuwissen A J P 2008 IEEE Electron Dev. Lett. 29 347
[17] Pelamatti A, Belloir J, Messien C, Goiffon V, Estribeau M, Magnan P, Virmontois C, Saint-Pé O and Paillet P 2015 IEEE Trans. Electron. Dev. 62 1200
[18] Gao Z Y, Xu J T, Zhou Y M and Nie K M 2016 IEEE Sensors J. 16 2367
[19] Cao C, Shen B L, Zhang B, Wu L S and Wang J F 2015 IEEE J. Electron. Dev. Soc. 3 306
[20] Chao Y P, Chen Y C, Chou K Y, Sze J J, Hsueh F L and Wuu S W 2014 IEEE J. Electron Dev. Soc. 2 59
[21] Khan U and Sarkar M 2018 IEEE Trans. Electron. Dev. 65 2892
[22] Goiffon V, Estribeau M, Michelot J, Cervantes P, Pelamatti A, Marcelot O and Magnan P 2014 IEEE J. Electron Dev. Soc. 2 65
[23] Filgueira K B, Martínez P L and Aranda J B R 2015 IEEE Trans. Electron. Dev. 63 16
[24] Xu Y, Ge X L and Theuwissen A J P 2016 IEEE Trans. Electron. Dev. 63 42
[25] Sze S M and Ng K K 2007 Physics Of Semiconductor Devices, 3rd edn. (Chichester: John Wiley & Sons) p. 501 |
| No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|
