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Chin. Phys. B, 2019, Vol. 28(9): 098501    DOI: 10.1088/1674-1056/ab3443
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Prev   Next  

Efficient molecular model for squeeze-film damping in rarefied air

Cun-Hao Lu(陆存豪)1, Pu Li(李普)1, Yu-Ming Fang(方玉明)2
1 School of Mechanical Engineering, Southeast University, Nanjing 211100, China;
2 College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 211100, China
Abstract  

Based on the energy transfer model (ETM) proposed by Bao et al. and the Monte Carlo (MC) model proposed by Hutcherson and Ye, this paper proposes an efficient molecular model (MC-S) for squeeze-film damping (SQFD) in rarefied air by releasing the assumption of constant molecular velocity in the gap. Compared with the experiment data, the MC-S model is more efficient than the MC model and more accurate than ETM. Besides, by using the MC-S model, the feasibility of the empirical model proposed by Sumali for SQFD of different plate sizes is discussed. It is proved that, for various plate sizes, the accuracy of the empirical model is relatively high. At last, the SQFD of various vibration frequencies is discussed, and it shows that, for low vibration frequency, the MC-S model is reduced to ETM.

Keywords:  micro-electro-mechanical system (MEMS)      squeeze-film air damping      rarefied air      molecular model  
Received:  27 February 2019      Revised:  27 June 2019      Accepted manuscript online: 
PACS:  85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)  
  47.45.Dt (Free molecular flows)  
Fund: 

Project supported by the National Natural Science Foundation of China (Grant No. 51375091).

Corresponding Authors:  Pu Li     E-mail:  seulp@263.net

Cite this article: 

Cun-Hao Lu(陆存豪), Pu Li(李普), Yu-Ming Fang(方玉明) Efficient molecular model for squeeze-film damping in rarefied air 2019 Chin. Phys. B 28 098501

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