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Chin. Phys. B, 2012, Vol. 21(10): 100702    DOI: 10.1088/1674-1056/21/10/100702
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Improvement of fabrication and characterization methods for micromechanical disk resonators

Zhao Hui (赵晖), Luo Wei (骆伟), Zheng Hai-Yang (郑海洋), Yang Jin-Ling (杨晋玲), Yang Fu-Hua (杨富华)
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Abstract  In this paper we present a novel method to fabricate reliable micro-electro-mechanical system (MEMS) disk resonators with high yield and good performance. The key breakthrough in the fabrication process is a novel approach to effectively restraining electro-chemical corrosion of polycrystalline silicon (polysilicon) electrically coupled with noble metals of MEMS devices by hydrofluoric acid (HF)-based solutions. In addition, a measurement architecture based on a differential readout topology is demonstrated. The differential circuit proposed here can effectively suppress noise and feed-through current by common-mode rejection of the differential amplifier. This differential amplifier circuit configuration is also used to build up a notch filter. The preliminary result about the temperature dependence of the resonance frequency is discussed, and the device failure is analysed.
Keywords:  disk resonator      differential readout      electro-chemical corrosion      notch filter  
Received:  08 March 2012      Revised:  11 April 2012      Accepted manuscript online: 
PACS:  07.10.Cm (Micromechanical devices and systems)  
  85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)  
Fund: Project supported by the National Basic Research Program of China (Grant Nos. 2009CB320305 and 2011CB933102).
Corresponding Authors:  Yang Jin-Ling     E-mail:  jlyang@semi.ac.cn

Cite this article: 

Zhao Hui (赵晖), Luo Wei (骆伟), Zheng Hai-Yang (郑海洋), Yang Jin-Ling (杨晋玲), Yang Fu-Hua (杨富华) Improvement of fabrication and characterization methods for micromechanical disk resonators 2012 Chin. Phys. B 21 100702

[1] Clark J R, Hsu W T, Abdelmoneum M A and Nguyen C T C 2005 J. Microelectromech. Syst. 14 1298
[2] Li S S, Lin Y W, Ren Z and Nguyen C T C 2007 Digest Tech. Papers 2007 Transducers'07 Conference, June 11-14, 2007, Lyon, France, p. 307
[3] Nguyen C T C 2007 IEEE Trans. Ultrason. Ferroelect. Freq. Contral 54 251
[4] Demirci M U and Nguyen C T C 2005 Proceedings IEEE MEMS'05 Conference, January 30-February 3, 2005, Miami, Florida, p. 207
[5] Mojiri M, Karimi-Ghartemani M and Bakhshai A 2007 IEEE Transactions on Signal Process. 55 85
[6] Xie J, Liu Y F, Zhang M L, Yang J L and Yang F H 2011 Proceedings IEEE MEMS'11 Conference, January 23-27, 2011, Cancun, Mexico, p. 205
[7] Wang J, Ren Z and Nguyen C T C 2004 IEEE Trans. Ultrason. Ferroelect. Freq. Contral 51 1607
[8] Huang Q Z, Yu J Z, Chen S W, Xu X J, Han W H and Fan Z C 2008 Chin. Phys. B 17 2562
[9] Xie J, Liu Y F, Yang J L, Tang L J and Yang F H 2009 J. Semicond. 30 083003
[10] Miller D C, Hughes W L, Wang Z L, Gall K and Stoldt C R 2007 J. Microelectromech. Syst. 16 87
[11] Miller D C, Boyce B L, Gall K and Stoldt C R 2007 Appl. Phys. Lett. 90 191902
[12] Lopez1 J L, Verd J, Giner J, Uranga A, Murillo G, Marigo E, Torres F, Abadal G and Barniol N 2009, Digest Tech. Papers Transducers'09 Conference, USA, June 21-25, 2009, Denver CO p. 557
[13] Biebl M, Brandl G and Howe R T 1995 Proceedings Transducers' 95, Sweden, p. 80
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