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A large bandwidth photonic delay line using passive cascaded silicon-on-insulator microring resonators |
Hu Ying-Tao(胡应涛)a), Xiao Xi(肖希)a), Li Zhi-Yong(李智勇)a), Li Yun-Tao(李运涛)a), Fan Zhong-Chao(樊中朝) b), Han Wei-Hua(韩伟华)b), Yu Yu-De(俞育德)a), and Yu Jin-Zhong(余金中) a)† |
a State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; b Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
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Abstract This paper investigated the design and the characterization of a photonic delay line based on passive cascaded silicon-on-insulator (SOI) microrings. We considered the compromise of group delay, bandwidth and insertion loss. A 3-stage double channel side-coupled integrated spaced sequence of resonator (SCISSOR) device was optimized by shifting the resonance of each microring and fabricated with electron beam lithography and dry etching. The group delay was measured to be 17 ps for non-return-to-zero signals at different bit rates and the bandwidth of 78 GHz was achieved. The experiment result agreed well with our simulation.
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Received: 25 January 2011
Revised: 27 February 2011
Accepted manuscript online:
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PACS:
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42.60.Da
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(Resonators, cavities, amplifiers, arrays, and rings)
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42.79.-e
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(Optical elements, devices, and systems)
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42.82.-m
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(Integrated optics)
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Cite this article:
Hu Ying-Tao(胡应涛), Xiao Xi(肖希), Li Zhi-Yong(李智勇), Li Yun-Tao(李运涛), Fan Zhong-Chao(樊中朝), Han Wei-Hua(韩伟华), Yu Yu-De(俞育德), and Yu Jin-Zhong(余金中) A large bandwidth photonic delay line using passive cascaded silicon-on-insulator microring resonators 2011 Chin. Phys. B 20 074208
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