Study on the delamination of tungsten thin films on Sb2Te3
Xu Jia-Qing(徐嘉庆)a)†, Liu Bo(刘波)a), Song Zhi-Tang(宋志棠)a), Feng Song-Lin(封松林)a), and Chen Bomyb)
a Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science, Changning Road, Shanghai 200050,China; b Silicon Storage Technology, Inc., 1171 Sonora Court,Sunnyvale, CA 94086, USA
Abstract To investigate the reliability of electrode materials for chalcogenide random access memory (C-RAM) applications, the geometry and time evolution of the worm-like delamination patterns on a tungsten/Sb$_{2}$Te$_{3}$ bilayer system surface are observed by field emission scanning electronic microscope (FESEM) and optical microscopy. The tungsten film stress and interface toughness are estimated using a straight-side model. After confirming the instability of this system being due to large compressive stress stored in the tungsten film and relative poor interface adhesion, a preliminary solution as the inset of a TiN adhesion layer is presented to improve the system performances.
Received: 25 August 2005
Revised: 29 April 2006
Accepted manuscript online:
Fund: Project Supported by the National High Technology Development Program of China (Grant No
2004AA302G20), Science and Technology Council of Shanghai (Grant Nos 0452nm012, 04DZ05612, 04ZR14154, 04JC14080, 05JC14076, AM0414, 05nm05043, Chinese Academy of Sciences (Grant
No Y2005027), and Silicon Storage Technology, Inc.
Cite this article:
Xu Jia-Qing(徐嘉庆), Liu Bo(刘波), Song Zhi-Tang(宋志棠), Feng Song-Lin(封松林), and Chen Bomy Study on the delamination of tungsten thin films on Sb2Te3 2006 Chinese Physics 15 1849
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
