1 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; 2 Center for Transformative Science, ShanghaiTech University, Shanghai 201210, China; 3 School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China; 4 Center for Excellence in Superconducting Electronics, Chinese Academy of Sciences, Shanghai 200050, China; 5 University of Chinese Academy of Sciences, Beijing 100049, China
Abstract The accurate analysis of the elemental composition plays a crucial role in the research of functional materials. The emitting characteristic x-ray fluorescence (XRF) photons can be used for precisely discriminating the specified element. The detection accuracy of conventional XRF methodology using semiconductor detector is limited by the energy resolution, thus posing a challenge in accurately scaling the actual energy of each XRF photon. We adopt a novel high-resolution x-ray spectrometer based on the superconducting transition-edge sensor (TES) for the XRF spectroscopy measurement of different elements. Properties including high energy resolution, high detection efficiency and precise linearity of the new spectrometer will bring significant benefits in analyzing elemental composition via XRF. In this paper, we study the emph{L}-edge emission line profiles of three adjacent rare earth elements with the evenly mixed sample of their oxide components: terbium, dysprosium and holmium. Two orders of magnitude better energy resolution are obtained compared to a commercial silicon drift detector. With this TES-based spectrometer, the spectral lines overlapped or interfered by background can be clearly distinguished, thus making the chemical component analysis more accurate and quantitative. A database of coefficient values for the line strength of the spectrum can then be constructed thereafter. Equipped with the novel XRF spectrometer and an established coefficient database, a direct analysis of the composition proportion of a certain element in an unknown sample can be achieved with high accuracy.
(Chemical composition analysis, chemical depth and dopant profiling)
Fund: Project supported by the National Major Scientific Research Instrument Development Project (Grant No. 11927805), the National Key Research and Development Program of China (Grant No. 2022YFF0608303), the NSFC Young Scientists Fund (Grant No. 12005134), the Shanghai-XFEL Beamline Project (SBP) (Grant No. 31011505505885920161A2101001), and the Shanghai Municipal Science and Technology Major Project (Grant No. 2017SHZDZX02).
Corresponding Authors:
Shuo Zhang, Zhi Liu
E-mail: shuozhang@shanghaitech.edu.cn;liuzhi@shanghaitech.edu.cn
Cite this article:
Bingjun Wu(吴秉骏), Jingkai Xia(夏经铠), Shuo Zhang(张硕), Qiang Fu(傅强), Hui Zhang(章辉),Xiaoming Xie(谢晓明), and Zhi Liu(刘志) Elemental composition x-ray fluorescence analysis with a TES-based high-resolution x-ray spectrometer 2023 Chin. Phys. B 32 097801
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