ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
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Integrated physics package of a chip-scale atomic clock |
Li Shao-Liang (李绍良)a b, Xu Jing (徐静)b, Zhang Zhi-Qiang (张志强)a b, Zhao Lu-Bing (赵璐冰)a b, Long Liang (龙亮)a b, Wu Ya-Ming (吴亚明)a |
a State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
b University of Chinese Academy of Sciences, Beijing 100049, China |
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Abstract The physics package of a chip-scale atomic clock (CSAC) has been successfully realized by integrating vertical cavity surface emitting laser (VCSEL), neutral density (ND) filter, λ/4 wave plate, 87Rb vapor cell, photodiode (PD), and magnetic coil into a cuboid metal package with a volume of about 2.8 cm3. In this physics package, the critical component, 87Rb vapor cell, is batch-fabricated based on MEMS technology and in-situ chemical reaction method. Pt heater and thermistors are integrated in the physics package. A PTFE pillar is used to support the optical elements in the physics package, in order to reduce the power dissipation. The optical absorption spectrum of 87Rb D1 line and the microwave frequency correction signal are successfully observed while connecting the package with the servo circuit system. Using the above mentioned packaging solution, a CSAC with short-term frequency stability of about 7× 10-10τ-1/2 has been successfully achieved, which demonstrates that this physics package would become one promising solution for the CSAC.
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Received: 29 August 2013
Revised: 23 December 2013
Accepted manuscript online:
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PACS:
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43.58.Hp
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(Tuning forks, frequency standards; frequency measuring and recording instruments; time standards and chronographs)
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32.80.Qk
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(Coherent control of atomic interactions with photons)
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32.30.Bv
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(Radio-frequency, microwave, and infrared spectra)
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85.30.De
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(Semiconductor-device characterization, design, and modeling)
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Fund: Project supported by the Knowledge Innovation Project of Chinese Academy of Sciences (Grant No. KGCX2-YW-143). |
Corresponding Authors:
Wu Ya-Ming
E-mail: yamingwu@mail.sim.ac.cn
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About author: 43.58.Hp; 32.80.Qk; 32.30.Bv; 85.30.De |
Cite this article:
Li Shao-Liang (李绍良), Xu Jing (徐静), Zhang Zhi-Qiang (张志强), Zhao Lu-Bing (赵璐冰), Long Liang (龙亮), Wu Ya-Ming (吴亚明) Integrated physics package of a chip-scale atomic clock 2014 Chin. Phys. B 23 074302
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