| ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
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Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing |
| Ting-Yang Yan(颜庭阳)1,2, Xiang Shen(沈祥)1,2, Rong-Ping Wang(王荣平)3, Guo-Xiang Wang(王国祥)1,2, Shi-Xun Dai(戴世勋)1,2, Tie-Feng Xu(徐铁峰)1,2, Qiu-Hua Nie(聂秋华)1,2 |
1 Laboratory of Infrared Material and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China;
2 Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China;
3 The Australian National University, Canberra, ACT 2600, Australia |
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Abstract Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.
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Received: 20 September 2016
Revised: 05 December 2016
Accepted manuscript online:
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PACS:
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42.79.Gn
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(Optical waveguides and couplers)
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42.82.Cr
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(Fabrication techniques; lithography, pattern transfer)
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71.23.Cq
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(Amorphous semiconductors, metallic glasses, glasses)
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07.07.Df
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(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
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| Fund: Project supported by the National Natural Science Foundation of China (Grant No. 61377061), the Public Project of Zhejiang Province, China (Grant No. 2014C31146), and sponsored by K. C. Wong Magna Fund in Ningbo University, China. |
Corresponding Authors:
Xiang Shen
E-mail: shenxiang@nbu.edu.cn
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Cite this article:
Ting-Yang Yan(颜庭阳), Xiang Shen(沈祥), Rong-Ping Wang(王荣平), Guo-Xiang Wang(王国祥), Shi-Xun Dai(戴世勋), Tie-Feng Xu(徐铁峰), Qiu-Hua Nie(聂秋华) Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing 2017 Chin. Phys. B 26 024213
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