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Chin. Phys. B, 2014, Vol. 23(7): 075202    DOI: 10.1088/1674-1056/23/7/075202
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Prev   Next  

Mitigation of energetic ion debris from Gd plasma using dual laser pulses and the combined effect with ambient gas

Dou Yin-Ping, Sun Chang-Kai, Liu Chao-Zhi, Gao Jian, Hao Zuo-Qiang, Lin Jing-Quan
School of Science, Changchun University of Science and Technology, Changchun 130022, China
Abstract  For the next-generation beyond extreme ultraviolet lithography (EUVL) sources, gadolinium (Gd) plasma with emission wavelength at 6.7 nm seems to be the leading candidate. Similar to the Sn target 13.5 nm light source, ion debris mitigation is one of the most important tasks in the laser-produced Gd plasma EUV source development. In this paper, a dual-laser-pulse scheme, which uses a low energy pulse to produce a pre-plasma and a main pulse after a time delay to shoot the pre-plasma, is employed to mitigate the energetic ion generation from the source. Optimal conditions (such as pre-pulse energy and wavelength, and the time delay between the pre-pulse and the main pulse for mitigating the ion energy) are experimentally obtained, and with the optimal conditions, the peak of the ion energy is found to be reduced to 1/18 of that of a single laser pulse case. Moreover, the combined effect by applying ambient gas to the dual-pulse scheme for ion debris mitigation is demonstrated, and the result shows that the yield of Gd ions is further reduced to around 1/9 of the value for the case with dual laser pulses.
Keywords:  extreme ultraviolet source      laser-induced plasma      Gd plasma      ion debris     
Received:  21 October 2013      Published:  15 July 2014
PACS:  52.38.-r (Laser-plasma interactions)  
  52.59.Px (Hard X-ray sources)  
  52.59.Ye (Plasma devices for generation of coherent radiation ?)  
Fund: Project supported by the National Basic Research Program of China (Grant No. 2013CB922404), the National Natural Science Foundation of China (Grant Nos. 11074027, 61178022, 11274053, and 11211120156), the Science & Technology Department of Jilin Province, China (Grant No. 20111812), the Research Fund for the Doctoral Program of Higher Education of China (Grant Nos. 20122216120009, 20122216110007, and 20112216120006), and the Young Scientists Fund of Changchun University of Science and Technology, China (Grant No. 000520).
Corresponding Authors:  Sun Chang-Ka, Lin Jing-Quan     E-mail:  changkaisun@cust.edu.cn;linjingquan@cust.edu.cn
About author:  52.38.-r; 52.59.Px; 52.59.Ye

Cite this article: 

Dou Yin-Ping, Sun Chang-Kai, Liu Chao-Zhi, Gao Jian, Hao Zuo-Qiang, Lin Jing-Quan Mitigation of energetic ion debris from Gd plasma using dual laser pulses and the combined effect with ambient gas 2014 Chin. Phys. B 23 075202

[1] Namba S, Fujioka S, Nishimura H, Yasuda Y, Nagai K, Miyanaga N, Izawa Y, Mima K and Takiyama K 2006 Appl. Phys. Lett. 88 171503
[2] Morris O, Reilly F O, Dunne P and Hayden P 2008 Appl. Phys. Lett. 92 231503
[3] Dou Y P, Sun C K and Lin J Q 2013 Chin. Opt. 6 22 (in Chinese)
[4] Dong Q L, Zhang J, Wang S J, Zhao J and Li Y J 2007 Chin. Phys. 36 609
[5] Zheng Z Y, Zhang Y, Wu X W, Lu X, Li Y T and Zhang J 2007 Chin. Phys. 36 236
[6] Wang W, Zhang J and Senecha V K 2002 Acta Phys. Sin. 51 590 (in Chinese)
[7] Otsuka T, Kibane D, Higashiguchi T, Yatagai N, Yatagai T, Jiang W H, Endo A, Dunne P and O'Sullivan G 2010 Appl. Phys. Lett. 97 231503
[8] Otsuka T, Kilbane D, White J, Higashiguchi T, Yugami N, Yatagai T, Jiang W H, Endo A, Dunne P and O'Sullivan G 2010 Appl. Phys. Lett. 97 111503
[9] Cummins T, Otsuka T, Yugami N, Wei H J, Endo A, Li B W, O'Gorman C, Dunne P, Sokell E, O'Sullivan G and Higashiguchi T 2012 Appl. Phys. Lett. 100 061118
[10] Shinsuke F, Masashi S, Yoshinori S, Shinsuke M, Hirokazu S, Yuki N, Tatsuya A, Hiroaki N, Norimasa O, Atsushi S, Katsunobu N, Noriaki M, Yasukazu I and Kunioki M 2008 Appl. Phys. Lett. 92 241502
[11] Haney S J, Berger K W, Kubiak G D, Rockett P D and Hunter J 1993 Appl. Opt. 32 6934
[12] Harilal S S, O'Shay B and Tillack M S 2005 J. Appl. Phys. 98 036102
[13] Azuma H, Nishimura Y, Sakata A and Takeuchi A 2002 Appl. Surf. Sci. 197 224
[14] Dunne P, O'Sullivan G and O'Reilly D 1999 Appl. Phys. Lett. 76 34
[15] Grismayer T and Mora P 2006 Phys. Plasmas 13 032103
[16] Tao Y, Tillack M S, Harillal S S, Sequoia K L and Najmabadi F 2007 J. Appl. Phys. 101 023305
[17] Tao Y and Tillack M S 2006 Appl. Phys. Lett. 89 111502
[18] Freeman J R, Harilal S S and Hassanein A 2011 J. Appl. Phys. 110 083303
[19] Higashiguchi T, Dojyo N, Hamada M, Sasaki W and Kubodera S 2006 Appl. Phys. Lett. 88 201503
[20] Otsuka T, Kilbane D, White J, Higashiguchi T,Yugami N, Yatagai T, Jiang W H, Endo A, Dunne P and O'Sullivan G 2010 Appl. Phys. Lett. 97 111503
[21] Sun Y B, Lin J Q, Gao X and Zhao Z M 2012 Sci. Chin. Phys. Mech. Astron. 55 392
[22] Mora P 2005 Phys. Plasmas 12 112102
[23] Grismayer T and Mora P 2006 Phys. Plasmas 13 032103
[24] Burdt R A, Yuspeh S, Sequoia K L, Tao Y Z, Tillack M S and Najmabadi F 2009 J. Appl. Phys. 106 033310
[25] Morris O, OReilly F, Dunne P and Hayden P 2008 Appl. Phys. Lett. 92 231503
[26] Ziegler J F 1999 J. Appl. Phys. 85 1249
[27] http://henke.lbl.gov/optical_constants/gastrn.html
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