Experimental study of noncontact ultrasonic motor with non-symmetrical electrode
Yang Bin (杨斌), Liu Jing-Quan (刘景全), Chen Di (陈迪), Zhou Wei-Min (周伟民), Cai Bing-Chu (蔡炳初)
National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University,Shanghai 200030, China
Abstract We have proposed a novel noncontact ultrasonic motor based on non-symmetrical electrode driving. The configuration of this electrode and the fabrication process of rotors are presented. Its vibration characteristics are computed and analysed by using the finite element method and studied experimentally. Good agreement between them is obtained. Moreover, it is also shown that this noncontact ultrasonic motor is operated in antisymmetric radial vibration mode of $B_{21}$ mode. The maximum revolution speed for three-blade and six-blade rotors are 5100 and 3700 r/min at an input voltage of 20V, respectively. Also, the noncontact high-speed revolution of the rotors can be realized by the parts of I, III of the electrode or II, IV of the electrode. The levitation distance between the stator and rotor is about 140$\mu $m according to the theoretical calculation and the experimental measurement.
Received: 05 September 2005
Revised: 20 October 2005
Accepted manuscript online:
(Dielectric, ferroelectric, and piezoelectric devices)
Fund: Project supported by the National Natural Science Foundation of China (Grant No 50205017).
Cite this article:
Yang Bin (杨斌), Liu Jing-Quan (刘景全), Chen Di (陈迪), Zhou Wei-Min (周伟民), Cai Bing-Chu (蔡炳初) Experimental study of noncontact ultrasonic motor with non-symmetrical electrode 2006 Chinese Physics 15 454
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