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Other articles related with "inductively coupled plasmas"：
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45202 |
Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), Jia Liu(刘佳), You-Nian Wang(王友年) |
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Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas |
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Chin. Phys. B
2018 Vol.27 (4): 45202-045202
[Abstract]
(612)
[HTML 1 KB]
[PDF 1301 KB]
(246)
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115201 |
Xu Hui-Jing (徐会静), Zhao Shu-Xia (赵书霞), Gao Fei (高飞), Zhang Yu-Ru (张钰如), Li Xue-Chun (李雪春), Wang You-Nian (王友年) |
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Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model |
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Chin. Phys. B
2015 Vol.24 (11): 115201-115201
[Abstract]
(525)
[HTML 1 KB]
[PDF 380 KB]
(535)
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115202 |
Gao Fei (高飞), Zhang Yu-Ru (张钰如), Zhao Shu-Xia (赵书霞), Li Xue-Chun (李雪春), Wang You-Nian (王友年) |
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Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias |
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Chin. Phys. B
2014 Vol.23 (11): 115202-115202
[Abstract]
(693)
[HTML 1 KB]
[PDF 255 KB]
(389)
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