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Other articles related with "chemical mechanical polishing"：
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28301 |
Dao-Huan Feng(冯道欢), Ruo-Bing Wang(王若冰), Ao-Xue Xu(徐傲雪), Fan Xu(徐帆), Wei-Lei Wang(汪为磊), Wei-Li Liu(刘卫丽), and Zhi-Tang Song(宋志棠) |
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Mechanism of titanium-nitride chemical mechanical polishing |
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Chin. Phys. B
2021 Vol.30 (2): 28301-0
[Abstract]
(606)
[HTML 1 KB]
[PDF 1738 KB]
(271)
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118202 |
Hui Kong(孔慧), Junchao Huo(霍军朝), Chenliang Liang(梁晨亮), Shasha Li(李沙沙), Weili Liu(刘卫丽), Zhitang Song(宋志棠) |
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Polydisperse spherical colloidal silica particles: Preparation and application |
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Chin. Phys. B
2016 Vol.25 (11): 118202-118202
[Abstract]
(549)
[HTML 0 KB]
[PDF 2480 KB]
(593)
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58301 |
Chenliang Liang(梁晨亮), Weili Liu(刘卫丽), Shasha Li(李沙沙), Hui Kong(孔慧), Zefang Zhang(张泽芳), Zhitang Song(宋志棠) |
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A nano-scale mirror-like surface of Ti-6Al-4V attained by chemical mechanical polishing |
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Chin. Phys. B
2016 Vol.25 (5): 58301-058301
[Abstract]
(644)
[HTML 1 KB]
[PDF 1238 KB]
(350)
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48301 |
Yan Wei-Xia (闫未霞), Wang Liang-Yong (王良咏), Zhang Ze-Fang (张泽芳), Liu Wei-Li (刘卫丽), Song Zhi-Tang (宋志棠) |
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Iron trichloride as oxidizer in acid slurry for chemical mechanical polishing of Ge2Sb2Te5 |
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Chin. Phys. B
2014 Vol.23 (4): 48301-048301
[Abstract]
(528)
[HTML 1 KB]
[PDF 771 KB]
(723)
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38102 |
Wang Liang-Yong(王良咏), Liu Bo(刘波), Song Zhi-Tang(宋志棠), Liu Wei-Li(刘卫丽), Feng Song-Lin(封松林), David Huang(黄丕成), and S.V Babu |
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Origin of high oxide to nitride polishing selectivity of ceria-based slurry in the presence of picolinic acid |
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Chin. Phys. B
2011 Vol.20 (3): 38102-038102
[Abstract]
(1344)
[HTML 1 KB]
[PDF 296 KB]
(4762)
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