Design and simulation of a silicon-based hybrid integrated optical gyroscope system

doi:10.1088/1674-1056/ac81a9

Abstract By combining a silicon-based lithium niobate modulator and a silicon-based Si₃N₄ resonator with silicon-based photonics technology, a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper. The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link, which provides a theoretical design reference to improve the system's sensitivity. When the wavelength is 1550 nm, the conversion frequency of the dual-ring optical path is 50 MHz, the coupling coefficient is 0.2, and the radius R is 1000 μm, the quality factor of the silicon-based Si₃N₄ resonator is 2.58×10⁵, which is 1.58 times that of the silicon-on-insulator resonator. Moreover, the effective number of times the light travels around the ring before leaving the micro-ring is 5.93, which is 1.62 times that of the silicon-on-insulator resonator. The work fits the gyro dynamic output diagram, and solves the problem of low sensitivity at low speed by setting the phase offset. This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.

Keywords: silicon photonics integrated optical gyroscope micro-ring resonator Sagnac effect

Received: 05 May 2022
Revised: 11 July 2022
Accepted manuscript online: 18 July 2022

PACS:	42.81.Pa	(Sensors, gyros)
	42.82.Et	(Waveguides, couplers, and arrays)
	42.82.-m	(Integrated optics)
	42.82.Fv	(Hybrid systems)

Fund: Project supported by the science and technology general project of Beijing Municipal Education Commission (Grant No. KM202111232019), Beijing Municipal Natural Science Foundation (Grant No. 2214058), the Discipline Innovation Program of Higher Education (Grant No. D17021), the Open Project of the State Key Laboratory of Integrated Optoelectronics (Grant No. IOSKL2020KF22), Beijing Great Wall Scholars Program (Grant No. CIT&TCD20190323), the National Natural Science Foundation of China (Grant No. 61875237), and Beijing Youth Talent Support Program (Grant No. Z2019042).

Corresponding Authors: Dong-Liang Zhang, Zhe-Hai Zhou
E-mail: zdl_photonics@bistu.edu.cn;zhouzhehai@bistu.edu.cn

Cite this article:

Dao-Xin Sun(孙道鑫), Dong-Liang Zhang(张东亮), Li-Dan Lu(鹿利单), Tao Xu(徐涛),Xian-Tong Zheng(郑显通), Zhe-Hai Zhou(周哲海), and Lian-Qing Zhu(祝连庆) Design and simulation of a silicon-based hybrid integrated optical gyroscope system 2023 Chin. Phys. B 32 044212

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