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Special Issue:
SPECIAL TOPIC — Celebrating the 70th Anniversary of the Physics of Jilin University
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| SPECIAL TOPIC—Celebrating the 70th Anniversary of the Physics of Jilin University |
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Relationship between the spatial position of the seed and growth mode for single-crystal diamond grown with an enclosed-type holder |
| Wen-Liang Xie(谢文良)1,2, Xian-Yi Lv(吕宪义)1,2, Qi-Liang Wang(王启亮)1,2, Liu-An Li(李柳暗)1,2,†, and Guang-Tian Zou(邹广田)1,2,‡ |
1. State Key Laboratory of Superhard Materials, Jilin University, Changchun 130012, China;
2. Shenzhen Research Institute, Jilin University, Shenzhen 518057, China |
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Abstract The relationship between the spatial position of the diamond seed and growth mode is investigated with an enclosed-type holder for single-crystal diamond growth using the microwave plasma chemical vapor deposition epitaxial method. The results demonstrate that there are three main regions by varying the spatial position of the seed. Due to the plasma concentration occurring at the seed edge, a larger depth is beneficial to transfer the plasma to the holder surface and suppress the polycrystalline diamond rim around the seed edge. However, the plasma density at the edge decreases drastically when the depth is too large, resulting in the growth of a vicinal grain plane and the reduction of surface area. By adopting an appropriate spatial location, the size of single-crystal diamond can be increased from 7 mm × 7 mm × 0.35 mm to 8.6 mm × 8.6 mm × 2.8 mm without the polycrystalline diamond rim.
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Received: 03 April 2022
Revised: 17 June 2022
Accepted manuscript online:
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PACS:
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81.05.ug
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(Diamond)
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77.84.Bw
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(Elements, oxides, nitrides, borides, carbides, chalcogenides, etc.)
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73.40.Kp
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(III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)
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82.80.Pv
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(Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.))
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| Fund: Project supported by the Key-Area Research and Development Program of Guangdong Province, China (Grant No. 2020B0101690001). |
Corresponding Authors:
Liu-An Li, Guang-Tian Zou
E-mail: liliuan@jlu.edu.cn;gtzou@jlu.edu.cn
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Cite this article:
Wen-Liang Xie(谢文良), Xian-Yi Lv(吕宪义), Qi-Liang Wang(王启亮), Liu-An Li(李柳暗), and Guang-Tian Zou(邹广田) Relationship between the spatial position of the seed and growth mode for single-crystal diamond grown with an enclosed-type holder 2022 Chin. Phys. B 31 108106
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