Please wait a minute...
Chin. Phys. B, 2018, Vol. 27(12): 124702    DOI: 10.1088/1674-1056/27/12/124702
ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS Prev   Next  

Numerical simulation of metal evaporation based on the kinetic model equation and the direct simulation Monte Carlo method

Xiaoyong Lu(卢肖勇)1,2, Xiaozhang Zhang(张小章)1, Zhizhong Zhang(张志忠)2
1 Department of Engineering Physics, Tsinghua University, Beijing 100084, China;
2 Research Institute of Physics and Chemical Engineering of Nuclear Industry, Tianjin 300180, China
Abstract  

Metal evaporation on the basis of the kinetic model equations (BGK and S-model) and the direct simulation Monte Carlo (DSMC) method was investigated computationally under the circumstances of collimators existing or not. Numerical data of distributions of number density, bulk velocity and temperature were reported over a wide range of evaporation rate. It was shown that these results reached a good agreement for the case of small evaporation rate, while the deviations became increasingly obvious with the increase of evaporation rate, especially when the collimators existed. Moreover, the deposition thickness over substrate obtained from the kinetic model equations were inaccurate even though the evaporation rate was small. All of the comparisons showed the reliability of the kinetic model equations, which require less computational cost at small evaporation rate and simple structure.

Keywords:  kinetic model equations      DSMC      metal evaporation      collimators  
Received:  22 June 2018      Revised:  21 August 2018      Accepted manuscript online: 
PACS:  47.45.-n (Rarefied gas dynamics)  
  51.10.+y (Kinetic and transport theory of gases)  
Corresponding Authors:  Xiaozhang Zhang     E-mail:  zhangxzh@mail.tsinghua.edu.cn

Cite this article: 

Xiaoyong Lu(卢肖勇), Xiaozhang Zhang(张小章), Zhizhong Zhang(张志忠) Numerical simulation of metal evaporation based on the kinetic model equation and the direct simulation Monte Carlo method 2018 Chin. Phys. B 27 124702

[1] Waichman K 1996 Phys. Fluids 8 1321
[2] Kong Y F, Wang D W, Lv J H and Ying C T 1994 Chin. J. Laser 21 16 (in Chinese)
[3] Xie G F, Wang D W and Ying C T 2002 Acta Phys. Sin. 51 2286 (in Chinese)
[4] Xie G F, Wang D W and Ying C T 2002 Acta Phys. Sin. 51 584 (in Chinese)
[5] Fan J, Boyd I D and Shelton C 2000 J. Vac. Sci. Technol. A 18 2937
[6] Venkattraman A and Alexeenko A A 2011 J. Vac. Sci. Technol. A 29 041509
[7] Venkattraman A and Alexeenko A A 2012 Vacuum 86 1748
[8] Graur I, Polikarpov A P and Sharipov F 2011 Comput. Fluids 49 87
[9] Varoutis S, Naris S, Hauer V, Day C and Valougeorgis D 2009 J. Vac. Sci. Technol. A 27 89
[10] Graur I, Polikarpov A P and Sharipov F 2012 Z. Angew. Math. Phys. 63 503
[11] Shakhov E M 1968 Fluid Dyn. 3 95
[12] McCormack F J 1973 Phys. Fluids 16 2095
[13] Sharipov F 2013 Vacuum 90 25
[14] Sharipov F 2009 J. Vac. Sci. Technol. A 27 479
[15] Sharipov F and Graur I A 2012 Vacuum 86 1778
[16] Sharipov F and Barreto Y B 2015 Vacuum 121 22
[1] Investigation of hypersonic flows through a cavity with sweepback angle in near space using the DSMC method
Guangming Guo(郭广明), Hao Chen(陈浩), Lin Zhu(朱林), and Yixiang Bian(边义祥). Chin. Phys. B, 2021, 30(7): 074701.
[2] Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition
Xiaoyong Lu(卢肖勇), Junjie Chai(柴俊杰). Chin. Phys. B, 2019, 28(7): 074702.
No Suggested Reading articles found!