Study on tapered crossed subwavelength gratings by Fourier modal method

doi:10.1088/1674-1056/19/10/104101

Abstract Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings in this paper. Three intuitive formulations of eigenvalue functions originating from the prototype are presented, and their convergences are compared through numerical calculation. One of them is found to be suitable in modeling the diffraction efficiency of the circular tapered crossed subwavelength gratings without high absorption, and staircase approximation is further proven valid for non-highly-absorptive tapered gratings. This approach is used to simulate the ''moth-eye'' antireflection surface on silicon, and the numerical result agrees well with the experimental one.

Keywords: tapered crossed subwavelength gratings Fourier modal method staircase approximation eigenvalue functions

Received: 17 December 2009
Revised: 19 May 2010
Accepted manuscript online:

PACS:	02.10.Ud	(Linear algebra)
	42.30.Kq	(Fourier optics)
	42.79.Dj	(Gratings)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 60636030).

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Chen Xi(陈熙), Zhong Yuan(钟源), Wang Qing(王青), Zhang Ye-Jin(张冶金), and Chen Liang-Hui(陈良惠) Study on tapered crossed subwavelength gratings by Fourier modal method 2010 Chin. Phys. B 19 104101

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