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Chin. Phys. B, 2008, Vol. 17(2): 721-725    DOI: 10.1088/1674-1056/17/2/060
CROSS DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Prev   Next  

Preparation, structure and ferromagnetic properties of the nanocrystalline Ti1-x MnxO2 thin films grown by radio frequency magnetron co-sputtering

Ding Peng(丁芃)a), Liu Fa-Min(刘发民)a), Yang Xin-An(杨新安)b), and Li Jian-Qi(李建奇)b)
a Department of Physics, School of Sciences, Beijing University of Aeronautics and Astronautics, Beijing 100083, China; Laboratory for Advanced Materials & Electron Microscopy, Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
Abstract  This paper reported that the Mn-doped TiO2 films were prepared by radio frequency (RF) magnetron co-sputtering. X-ray diffraction measurements indicate that the samples are easy to form the rutile structure, and the sizes of the crystal grains grow big and big as the Mn concentration increases. X-ray photoemission spectroscopy measurements and high resolution transmission electron microscope photographs confirm that the manganese ions have been effectively doped into the TiO2 crystal when the Mn concentration is lower than 21%. The magnetic property measurements show that the Ti1-xMnxO2 (x=0.21) films are ferromagnetic at room temperature, and the saturation magnetization, coercivity, and saturation field are 16.0emu/cm3, 167.5×80A/m and 3740×80A/m at room temperature, respectively. The room-temperature ferromagnetism of the films can be attributed to the new rutile Ti1-xMnxO2 structure formed by the substitution of Mn4+ for Ti4+ into the TiO2 crystal lattice, and could be explained by O vacancy (VO)-enhanced ferromagnetism model.
Keywords:  RF magnetron sputtering      Mn-doped TiO2 films      room-temperature ferromagnetic properties  
Received:  13 April 2007      Revised:  20 June 2007      Accepted manuscript online: 
PACS:  81.16.-c (Methods of micro- and nanofabrication and processing)  
  81.15.Cd (Deposition by sputtering)  
  68.55.-a (Thin film structure and morphology)  
  75.75.+a  
  75.70.Ak (Magnetic properties of monolayers and thin films)  
  75.60.Ej (Magnetization curves, hysteresis, Barkhausen and related effects)  
Fund: Project supported by the Aeronautical Science foundation of China (Grant No 2003ZG51069) and the National Defence Base Research of China.

Cite this article: 

Ding Peng(丁芃), Liu Fa-Min(刘发民), Yang Xin-An(杨新安), and Li Jian-Qi(李建奇) Preparation, structure and ferromagnetic properties of the nanocrystalline Ti1-x MnxO2 thin films grown by radio frequency magnetron co-sputtering 2008 Chin. Phys. B 17 721

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