Chin. Phys. B
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Chin. Phys. B  2017, Vol. 26 Issue (11): 115201    DOI: 10.1088/1674-1056/26/11/115201
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search |
Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure
Tagra Samir1, Yue Liu(刘悦)1, Lu-Lu Zhao(赵璐璐)1,2, Yan-Wen Zhou(周艳文)3
1. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams Ministry of Education, School of Physics, Dalian University of Technology, Dalian 116024, China;
2. School of Information Science and Engineering, Dalian Polytechnic University, Dalian 116034, China;
3. School of Materials & Metallurgy, University of Science & Technology Liaoning, Anshan 114051, China

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