Chin. Phys. B
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Chin. Phys. B  2013, Vol. 22 Issue (1): 018503    DOI: 10.1088/1674-1056/22/1/018503
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Mechanism of amorphous Ge2Sb2Te5 removal during chemical mechanical planarization in acidic H2O2 slurry
He Ao-Donga b, Song Zhi-Tanga, Liu Boa, Zhong Mina, Wang Liang-Yonga, Lü Ye-Ganga b, Feng Song-Lina
a State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system andInformation Technology, Chinese Academy of Sciences, Shanghai 200050, China;
b University of Chinese Academy of Sciences, Beijing 100049, China

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