Chinese Physics B
Introducing voids around the interlayer of AlN by high temperature annealing
Jianwei Ben(贲建伟), Jiangliu Luo(罗江流), Zhichen Lin(林之晨), Xiaojuan Sun(孙晓娟), Xinke Liu(刘新科), and Xiaohua Li(黎晓华)
Chin. Phys. B . 2022, (7): 76104 -076104 .  DOI: 10.1088/1674-1056/ac3d7f

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