Optical spectroscopy study of damage evolution in 6H-SiC by H$_{2}^{ + }$ implantation
Yong Wang(王勇), Qing Liao(廖庆), Ming Liu(刘茗), Peng-Fei Zheng(郑鹏飞), Xinyu Gao(高新宇), Zheng Jia(贾政), Shuai Xu(徐帅), and Bing-Sheng Li(李炳生)
Chin. Phys. B . 2021, (5): 56106 -056106 .  DOI: 10.1088/1674-1056/abe9a7