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Other articles related with "plasma radial uniformity"：
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65202 |
Wei Liu(刘巍), Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), You-Nian Wang(王友年), and Yong-Tao Zhao(赵永涛) |
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Time-resolved radial uniformity of pulse-modulated inductively coupled O2/Ar plasmas |
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Chin. Phys. B
2021 Vol.30 (6): 65202-065202
[Abstract]
(444)
[HTML 0 KB]
[PDF 945 KB]
(107)
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105206 |
Ying-Shuang Liang(梁英爽), Yu-Ru Zhang(张钰如), You-Nian Wang(王友年) |
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Influence of dielectric materials on uniformity of large-area capacitively coupled plasmas for N2/Ar discharges |
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Chin. Phys. B
2016 Vol.25 (10): 105206-105206
[Abstract]
(628)
[HTML 1 KB]
[PDF 13186 KB]
(328)
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