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Other articles related with "low-voltage plasma immersion ion implantation"：
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15201 |
Xiao-Yan Sun(孙晓艳), Yu-Ru Zhang(张钰如), Xue-Chun Li(李雪春), You-Nian Wang(王友年) |
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Fluid simulation of the pulsed bias effect on inductively coupled nitrogen discharges for low-voltage plasma immersion ion implantation |
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Chin. Phys. B
2017 Vol.26 (1): 15201-015201
[Abstract]
(717)
[HTML 1 KB]
[PDF 1139 KB]
(508)
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