Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma
Jun-Wu Wang(王均武)1, Xin-Bing Wang(王新兵)1,†, Du-Luo Zuo(左都罗)1, and Vassily S. Zakharov2
1 Wuhan National Research Center for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China; 2 Keldysh Institute of Applied Mathematics, Russian Academy of Sciences, Moscow, Russia
Abstract Extreme ultraviolet (EUV) source produced by laser-induced discharge plasma (LDP) is a potential technical means in inspection and metrology. A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system. The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera. The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry. An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm. The laser and discharge parameters such as laser energy, voltage, gap distance, and anode shape can influence the EUV emission.
Fund: Project supported by the Basic and Applied Basic Research Major Program of Guangdong Province, China (Grant No. 2019B030302003).
Corresponding Authors:
Xin-Bing Wang
E-mail: xbwang@hust.edu.cn
Cite this article:
Jun-Wu Wang(王均武), Xin-Bing Wang(王新兵), Du-Luo Zuo(左都罗), and Vassily S. Zakharov Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma 2021 Chin. Phys. B 30 095207
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